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The MicroProf® 100 is the universal surface metrology tool for quick and easy determination of topography, film thickness and sample thickness. As a compact tabletop unit and thus the smallest member of the MicroProf® multi-sensor family, the MicroProf® 100 also offers the full flexibility of its bigger brothers. It is based on proven FRT multi-sensor technology, in which different optical measurement methods – which can otherwise only be found in individual solutions – are merged into a universal and space-saving device.
In addition, the MicroProf® 100 can be equipped with the TTV option for doublesided sample inspection. This allows you to measure the top and bottom of the sample simultaneously and also determine the sample thickness during the same measurement process. Due to its modular design, this metrology tool can be tailored to your specific application. In addition to the various sensors with which the device can be equipped, the software can also be individually configured and measurement tasks can be performed either manually or automatically.
High-precision optical surface metrology tools for the characterization of various (functional / technical) surfaces – fast, efficient, non-destructive.
Maximum flexibility is provided by FRT’s multi-sensor technology, which combines different measuring methods and sensors in one universally applicable tool of the MicroProf series – available as tabletop or stand-alone model depending on application and sample size – space-saving and upgradeable to your changing measurement requirements.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
|travel||150 mm x 100 mm|
|drive type||direct drive|
|bearing type||crossed roller bearing|
|encoder resolution||50 nm|
|flatness||~ 1 µm / 100 mm|
|max. speed||200 mm / s|
|load capacity||5 kg|
|z-cxis travel||50 mm (100 mm optional)|
|environmental requirements||clean, vibration free, stable temperature|
|input voltage||110 V / 220 V AC, 1 Phase|
|footprint (L x W x H)||550 mm x 400 mm x 690 mm|
|weight||approx. 100 kg|
|Measuring Characteristics||CWL 600 µm *|
|measuring range xy||150 mm x 100 mm|
|measuring range z||600 µm|
|resolution (lateral)||2 µm|
|resolution (vertical)||6 nm|
* sensor CWL 600 µm taken as an example, other sensors are available