Discount Products: Look through products available for a 25% – 50% discount in 2020. The items provided on a first come, first serve basis. View Discounted Products
The MicroProf® 100 is the universal surface metrology tool for quick and easy determination of topography, film thickness and sample thickness. As a compact tabletop unit and thus the smallest member of the MicroProf® multi-sensor family, the MicroProf® 100 also offers the full flexibility of its bigger brothers. It is based on proven FRT multi-sensor technology, in which different optical measurement methods – which can otherwise only be found in individual solutions – are merged into a universal and space-saving device.
In addition, the MicroProf® 100 can be equipped with the TTV option for doublesided sample inspection. This allows you to measure the top and bottom of the sample simultaneously and also determine the sample thickness during the same measurement process. Due to its modular design, this metrology tool can be tailored to your specific application. In addition to the various sensors with which the device can be equipped, the software can also be individually configured and measurement tasks can be performed either manually or automatically.
Key Features
Manual Tools: MicroProf® 100, MicroProf® 200 und MicroProf® 300
High-precision optical surface metrology tools for the characterization of various (functional / technical) surfaces – fast, efficient, non-destructive.
Maximum flexibility is provided by FRT’s multi-sensor technology, which combines different measuring methods and sensors in one universally applicable tool of the MicroProf series – available as tabletop or stand-alone model depending on application and sample size – space-saving and upgradeable to your changing measurement requirements.
SYSTEM CHARACTERISTICS
tabletop unit with housing in modern industrial design
based on the established FRT multi-sensor technology
TTV option for double-sided sample inspection possible
integrated CCD camera with add-on illumination
motorized sensor approach with high-precision axis
simple and efficient control with FRT Acquire Software
user-friendly FRT Mark III evaluation software with numerous evaluation and display options according to DIN-EN-ISO and SEMI standards
fully automated 2D, 3D and film thickness measurements through FRT´s Acquire Automation XT metrology software
Key Benefits
attractive price-performance ratio
surface measuring instrument for the highest demands in industry and research
one measuring system for multiple tasks and applications
3D measurements of topography, film thickness and sample thickness with micro- and (sub)-nanometer resolution
wide range of sensors (point and field of view sensors)
professional quality assurance based on precise optical metrology
high performance and economical measuring tool
application-specific consulting and service from skilled FRT experts
Trust the Experts at ACA TMetrix Inc.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
Specifications
System
assembly
gantry design
sensor
multi-sensor
Scanning Stage
travel
150 mm x 100 mm
drive type
direct drive
bearing type
crossed roller bearing
encoder resolution
50 nm
flatness
~ 1 µm / 100 mm
max. speed
200 mm / s
load capacity
5 kg
z-axis
motorized axis
z-cxis travel
50 mm (100 mm optional)
System Requirements
environmental requirements
clean, vibration free, stable temperature
input voltage
110 V / 220 V AC, 1 Phase
footprint (L x W x H)
550 mm x 400 mm x 690 mm
weight
approx. 100 kg
Measuring Characteristics
CWL 600 µm *
measuring range xy
150 mm x 100 mm
measuring range z
600 µm
resolution (lateral)
2 µm
resolution (vertical)
6 nm
* sensor CWL 600 µm taken as an example, other sensors are available
