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Highlights MicroProf® 200

  • stand-alone tool
  • 200 mm x 250 mm measuring range (lateral)
  • high throughput, max. measuring speed 300 mm/sec
  • the standard – several hundred systems installed worldwide
  • fully automated and integrated manufacturing device (optional)
  • individually configurable



Introducing the FRT GmbH MICROPROF® 200

The MicroProf® 200 is the high-performance measuring device for the non-contact and non-destructive characterization of almost all surfaces and films, and has already been employed successfully by many companies. This surface measuring instrument is based on FRT´s established multi-sensor technology and is capable of performing numerous measuring tasks within just one system. A high-resolution CWL sensor allows for easy and reliable measuring of, e.g. topography, roughnessand contour. With a wide range of additional sensors it is also possible to adapt theMicroProf® 200 optimally and individually to your measuring task. Using the TTV module for inspection from both sides or using the module for automatic sample handling (MHU), the MicroProf® 200 can also be adapted easily to the customer’s new measurement requirements at any time. Simultaneously, the highest automation requirements get fulfilled.



FRT GmbH MICROPROF<sup>®</sup> 200

FRT GmbH MICROPROF<sup>®</sup> 200

Key Features

Manual Tools: MicroProf® 100, MicroProf® 200 und MicroProf® 300High-precision optical surface metrology tools for the characterization of various surfaces – fast, efficient, non-destructive.Maximum flexibility is provided by FRT’s multi-sensor technology, which combines different measuring methods and sensors in one universally applicable tool of the MicroProf series – available as tabletop or stand-alone model depending on application and sample size – space-saving and upgradeable to your changing measurement requirements.


  • full multi-sensor capability
  • housing in modern industrial design
  • integrated CCD camera with add-on illumination
  • control and measurement computer with TFT monitor
  • fast xy precision table with high motion and positioning accuracy
  • stable granite construction with excellent damping properties
  • simple and efficient control with FRT Acquire software
  • fully automated 2D and 3D measurements through FRT´s Acquire Automation XT metrology software
  • user-friendly FRT Mark III evaluation software with numerous evaluation and display options according to DIN-ISO and SEMI standards


Key Benefits

  • established measuring device from the technological leader in surface metrology
  • surface measuring instrument for the highest demands in industry and research
  • one measuring system for multiple tasks and applications
  • professional quality assurance based on precise optical metrology
  • can be used flexibly, is future-proof and can be expanded at any time
  • durable, minimal servicing and low maintenance
  • application specific consulting and service from skilled FRT experts


FRT GmbH MICROPROF<sup>®</sup> 200

Trust the Experts at ACA TMetrix Inc.

ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.


assembly gantry design
sensor multi-sensor
Scanning Stage
travel 250 mm x 200 mm
drive type direct drive
bearing type crossed roller bearing
encoder resolution 50 nm
flatness < 2 µm / 100 mm
max. speed 300 mm / s
load capacity 5 kg
z-axis motorized axis
z-cxis travel 50 mm (100 mm optional)
System Requirements
environmental requirements clean, vibration free, stable temperature
input voltage 110 V / 220 V AC, 1 Phase
footprint (L x W x H) 1100 mm x 820 mm x 1800 mm
weight approx. 500 kg
Measuring Characteristics CWL 600 µm *
measuring range xy 250 mm x 200 mm
measuring range z 600 µm
resolution (lateral) 2 µm
resolution (vertical) 6 nm

* sensor CWL 600 µm taken as an example, other sensors are available



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