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  • stand-alone tool
  • 415 mm x 305 mm measuring range (lateral)
  • high throughput, max. measuring speed 300 mm/sec
  • fully automated and integrated production tool (optional)
  • individually configurable
  • TTV option for double-sided measurement



Introducing the FRT GmbH MICROPROF® 300

The MicroProf® 300 is part of the high-performance and versatile MicroProf® generation and is particularly used in quality assurance, development and manufacturing. The smallest deviations from the ideal surface shape must be determined contact-free without destroying the sample as the surface must be precise down to the sub-μm range. Besides roughness of the sample surface, shape is one of the most important parameters. Narrow tolerances must be precisely determined. The MicroProf® 300 is perfect for these requirements and can also be integrated into production in a fully automated way. An extensive range of sensors and the option
of conducting double-sided sample inspections (TTV) make it possible to optimally and individually adapt the MicroProf® 300 to suit your measuring task at any time. Furthermore, the simple automation of  measurements boosts productivity and process reliability.


FRT GmbH MICROPROF<sup>®</sup> 300

FRT GmbH MICROPROF<sup>®</sup> 300

Key Features


„ full multi-sensor capability
„ integrated CCD camera with add-on illumination
„ motorized sensor approach with high-precision axis
„ vertical stitching function to expand the height measuring range
„ control and measurement computer with TFT monitor
„ simple and efficient control with FRT Acquire software

Key Benefits

„ attractive price-performance ratio
„ 3D measurements with micro- and (sub)-nanometer resolution
„ professional quality assurance based on precise optical metrology
„ high performance and economical measuring tool
„ durable, minimal servicing and low maintenance
„ fast availability and simple operation
„ application-specific consulting from skilled FRT experts
„ qualified and worldwide operating service network


FRT GmbH MICROPROF<sup>®</sup> 300

Trust the Experts at ACA TMetrix Inc.

ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.


assembly gantry design
sensor multi-sensor
Scanning Stage
travel 415 mm x 305 mm
drive type direct drive
bearing type crossed roller bearing
encoder resolution 50 nm
flatness < 2 µm / 100 mm
max. speed 300 mm / s
load capacity 5 kg
z-axis motorized axis
z-cxis travel 50 mm (100 mm optional)
System Requirements
environmental requirements clean, vibration free, stable temperature
input voltage 110 V / 220 V AC, 1 Phase
footprint (L x W x H) 1500 mm x 1010 mm x 1850 mm
weight approx. 900 kg
Measuring Characteristics CWL 600 µm *
measuring range xy 415 mm x 305 mm
measuring range z 600 µm
resolution (lateral) 2 µm
resolution (vertical) 6 nm

* sensor CWL 600 µm taken as an example, other sensors are available



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