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The MicroProf® 300 is part of the high-performance and versatile MicroProf® generation and is particularly used in quality assurance, development and manufacturing. The smallest deviations from the ideal surface shape must be determined contact-free without destroying the sample as the surface must be precise down to the sub-μm range. Besides roughness of the sample surface, shape is one of the most important parameters. Narrow tolerances must be precisely determined. The MicroProf® 300 is perfect for these requirements and can also be integrated into production in a fully automated way. An extensive range of sensors and the option
of conducting double-sided sample inspections (TTV) make it possible to optimally and individually adapt the MicroProf® 300 to suit your measuring task at any time. Furthermore, the simple automation of measurements boosts productivity and process reliability.
Key Features
SYSTEM CHARACTERISTICS
full multi-sensor capability
integrated CCD camera with add-on illumination
motorized sensor approach with high-precision axis
vertical stitching function to expand the height measuring range
control and measurement computer with TFT monitor
simple and efficient control with FRT Acquire software
Key Benefits
attractive price-performance ratio
3D measurements with micro- and (sub)-nanometer resolution
professional quality assurance based on precise optical metrology
high performance and economical measuring tool
durable, minimal servicing and low maintenance
fast availability and simple operation
application-specific consulting from skilled FRT experts
qualified and worldwide operating service network
Trust the Experts at ACA TMetrix Inc.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
Specifications
System
assembly
gantry design
sensor
multi-sensor
Scanning Stage
travel
415 mm x 305 mm
drive type
direct drive
bearing type
crossed roller bearing
encoder resolution
50 nm
flatness
< 2 µm / 100 mm
max. speed
300 mm / s
load capacity
5 kg
z-axis
motorized axis
z-cxis travel
50 mm (100 mm optional)
System Requirements
environmental requirements
clean, vibration free, stable temperature
input voltage
110 V / 220 V AC, 1 Phase
footprint (L x W x H)
1500 mm x 1010 mm x 1850 mm
weight
approx. 900 kg
Measuring Characteristics
CWL 600 µm *
measuring range xy
415 mm x 305 mm
measuring range z
600 µm
resolution (lateral)
2 µm
resolution (vertical)
6 nm
* sensor CWL 600 µm taken as an example, other sensors are available
