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FRT GmbH MICROPROF® DI

FRT GmbH MICROPROF® DI

Highlights MicroProf® DI

  • High-precision optical surface inspection for semiconductor applications
  • Metrology and Inspection flexibly combined in one fully automated platform
  • Defect inspection with singleshot module, step camera and microscope station
  • Fast and reliable inspection of defects down to sub-μm range
  • Dark field micro inspection and bright field macro inspection

 

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Introducing the FRT GmbH MICROPROF® DI

Innovative illumination concept

The innovative illumination concept of the MicroProf® DI makes a variety of defect types visible and detects local failures, inclusions and other defects regardless of their position. The MicroProf® DI includes several modules like optical inspection and classification of defects via single-shot and step module, review of defects via a high-precision microscope and comprehensive multi-sensor metrology with different topography and film thickness sensors.

 

FRT GmbH MICROPROF<sup>®</sup> DI



FRT GmbH MICROPROF<sup>®</sup> DI

Key Features

Highlights MicroProf® DI

  • High-precision optical surface inspection for semiconductor applications
  • Metrology and Inspection flexibly combined in one fully automated platform
  • Defect inspection with singleshot module, step camera and microscope station
  • Fast and reliable inspection of defects down to sub-μm range
  • Dark field micro inspection and bright field macro inspection

 



Key Benefits

Defect inspection software

Our defect inspection software provides effective visualization, versatile processing and fast generation of wafer maps as well as precise quantification and comprehensible documentation of defects. The software enables the user to display different views of a selected data set, e.g. wafer map and defect list with number, position, size and grey value of the respective defects. The software provides a wafer map showing the location of each defect in the selected data set. The defects are assigned according to user-defined criteria and synchronized with the defect list.


FRT GmbH MICROPROF<sup>®</sup> DI


Trust the Experts at ACA TMetrix Inc.

ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.

Specifications

Metrology unit
MicroProf® 300
Single-shot inspection module with various illumination methods
Step inspection module (DIUSM)
Review microscope with motorized 5-fold objective revolver
TTV setup
Film thickness sensor CWL FT / IRT
Thin film sensor FTR
Chromatic line sensor SLS
Confocal microscope FRT CFM/CFM DT
White light interferometer WLI FL/WLI PL
Pattern recognition software
3-point wafer fixture
Fully supporting wafer fixture with vacuum
Thermo unit (controlled hot and cold chuck)
In-plane deformation sensor
Wafer Handling unit
Manual without load ports
Robot unit
Pre-aligner
1 load port for 300 mm FOUPs/FOSBs SEMI-standard
1 load port for open cassette SEMI-standard
     > for 150 mm (6 inch) wafers
     > for 200 mm (8 inch) wafers
     > for 300 mm (12 inch) wafers
RFID reader
Vaccum end-effector
Edge grip handling
Handling of warped wafers (e.g. eWLB) and panels
Non-contact wafer handling
OCR reader (front/back)
Ionizer bar
FRT Software
Acquire Automation XT incl. one evaluation package + additional packages (if needed):
    > Defect Inspection
    > TTV, Bow, Warp
    > Bumps, Vias, Trenches
    > Critical Dimension, Overlay
    > Roughness and Waviness, Flatness
    > Step Height
    > Saw Marks
    > Film Thickness
    >Wafer Stress
    >Angle Evaluation
    >Nanotopography
    > Fine Alignment
SECS/GEM Interface (standard or customized)
Analysis software FRT Mark III
Measurement software FRT Acquire

 

 

Datasheet


Contact ACA TMetrix Inc.

Address

3585 Laird Road, Unit 15 & 16, Mississauga ON L5L 5Z8

Phone: 1-800-665-7301

Fax: 1-905-890-1959

Email: info@tmetrix.com

About ACA TMetrix Inc.

ACA TMetrix Inc. is a leading supplier of test instruments and design tools in Canada. For over 50 years we have provided services and support for products that are manufactured by the world's leading instrument suppliers.

TMetrix Ltd. is Part of the ACA Group of Companies. Allan Crawford Associates (ACA), is one of Canada's largest distributors of electronic components, test equipment, and scientific solutions.

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