The FRT GmbH MicroProf TL allows the characterisation of both the lateral and vertical deformation of samples under thermo load. In contrast to the other models of the MicroProf® series, the “TL” is equipped with our thermo unit – an integrated heating and cooling plate – and optionally a MicroDAC 2D deformation sensor provided by CWM. The deployment of the thermo unit allows to determine the behaviour of modules under “real conditions” or to simulate process steps under thermo load.
- optical surface metrology at different sample temperatures
- programmable temperature control
- from 10°C to 400°C
- high heating and cooling rate
- temperature stability: < 1°C
- fully automated
ADD-ON SYSTEM MICRODAC® TL FOR IN-PLANE MEASUREMENTS
Additional to out-of-plane measurements (warpage) microDAC®TL allows the investigation of in-plane displacements from single electrical components up to complete assemblies. With the high- precision camera setup global and local deformation fields can be measured with an accuracy up to 50 nm.
Area of application is the detection of weak points of electronic assemblies during internal or external load, like for example temperature driven deformations or distortions by mounting.
Especially, in conjunction with the numerical simulation the system is very beneficial. Both, thermo-mechanical material data (CTE) can be determined as input for the simulation as well as the simulation results can be verified by means of the deformations.
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