Products

• Flexibility
  • Temperatures range from -60°C to +300°C
  • Surfaces are nickel or gold-plated
  • Hybrid chuck design – operation with and without cooling unit
  • Field-upgradeable: On-site cold upgrades for all main prober platforms
• Highest Efficiency for Reduced Cost of Test
  • Up to 25% lower air consumption (CDA) than other systems on the market with no compromise in transition times
  • Up to 15% faster transition times than other systems on the market
• Low Thermal Resistance
  • Low Thermal Resistance Technology
  • MultiSense with multiple temperature sensors
  • Best temperature accuracy and uniformity
• Superior Electrical Performance
  • Isolated from ground
  • Includes a jack for grounding and biasing
  • Highly planar chuck surface for consistant contact force and overtravel

PureLine 3 Technology

First automated probe station to achieve -190dB spectral noise*

Plug In and Go

Integrated TestCell Power Management provides fully managed and filtered AC power to the entire system, prober and instruments

Autonomous 24/7 Operation

Up to 4x faster flicker noise thermal testing on 30 μm pads

Reduce Setup Time and Costs
Exclusive low noise site survey, and system verification services

• Quick and easy probe tip navigation
• Maximizes field-of-view
• High magnification
• Shadow-free view of the corresponding features
• Automatically configure and optimize performance
• cTUVus certified and CE
• Compatible with TopHat for perfect shielding
• 24/7 operating, Increased MTBF
• Stops all system motion and warns of unobserved contact

Contact Intelligence

• Ease of use –  Less experienced operators can perform DC measurements by simply pushing a button. This reduces the need of experienced users full time on each system.
• Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
• Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.

• Highest accuracy with backlash-free positioning
• Drift-free measurements over temperature and time*
• Easy, and safe swapping between arms
• Best signal integrity using optimized probe cabling systems
• Full thermal capability*
• Manual or progammable

• Ease of use –  Less experienced operators can perform an RF calibration up to 330 GHz by simply pushing a button. This reduces the need of experienced users full time on each system.
• Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
• Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.
• Calibration Monitor and Re-calibration – System will continuously monitor calibration drift, and automatically re-calibrate the system should the drift exceed a predefined limit.

• Comprehensive,
• Turn-key Integrated Measurement System (IMS)
• with Keysight PNA for On-wafer R&D Measurements
• from RF to millimeter wave to Terahertz

Accurate and precise measurement of device parameters up to 3,000 V

• Coaxial and triaxial measurements up to 3,000 V
• High-quality construction with low-noise electrical performance
• Replaceable probe tips in a variety of tip sizes
• Temperature range of -55 to 300ºC
• Triaxial measurement ensures a much better understanding of device leakage in the off state
• Highly reliable, stable and repeatable measurements
• Integrally designed as part of a complete measurement solution

Delivers superior guarding and shielding

• High-quality construction with low-noise electrical performance
• Kelvin version for convenient 4-point measurements
• Replaceable coaxial probe tips, with choice of tip radii, and full electrical guard to the probe tip
• SSMC 50 connectors
• Ultra-low, fA and fF measurements from -65 º C to 150 º C

• Light-tight version and EMI-shielded version for low noise and light-sensitive measurements
• Application flexibility, ideal for use in high frequency applications
• Sized to accommodate thermal chucks, laser cutter, and video equipment on the probe system
• Suitable for integration with vibration isolating tables

• Functional temperature range of -263 to +150°C
• Stainless steel tip material for thermal decoupling
• Coaxial cable with TCE matched inner and outer conductors
• Consistent tip geometry even at cryogenic temperatures

High-performance DC Parametric Probe

• Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
• Guarantees fully-guarded measurements to fA and fF levels
• Individual connectors provide force-sense connection for quasi-Kelvin and CV measurements
• Allows probing of different pad materials and sizes
• Fast replacement of worn probes without the need for tools

Multi-contact DC Probe with flat tip needles

• Power bypass inductance: 8 nH
• Standard DCQ probes have flat tip needles available in nickel-plated tungsten or BeCu with diameters of 0.75 mil, 1.0 mil and 1.5 mil.
• Supports collinear and non-standard needle configurations
• Up to 16 DC for standard; maximum of 24 DC for custom
• Ideal for probing the entire circuit for functional test
• DC probes can provide power or slow logic to circuit under test

Tables from simple to highly sensitive

• Designed for use with specific Probe Systems
• Tables to suit all facility requirements and applications
• Stable probing, even in submicron range
• Granite platen ensures rigidity and temperature stability
• Can be combined with the Shield Enclosures

Multi-contact DC Probe with full-radius needles

• Full-radius, nickel-plated tungsten needles
• Power bypass inductance: 16 nH
• Supports collinear and non-standard needle configurations
• Support up to a maximum of 12 ceramic blades DC needles / contacts
• Ideal for probing the entire circuit for functional test
• DC probes can provide power or slow logic to circuit under test

Rugged, deep reach RF probing for modules and circuit boards

• DC-40 GHz bandwidth
• 10 ps rise time
• Low insertion and return loss
• 2 mils of tip-to-tip compliance
• High probing angle and clearance