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FormFactor (Cascade Microtech) Ultra High-Power Probe (UHP)

FormFactor (Cascade Microtech) Ultra High-Power Probe (UHP)

Enabling single-contact high-current/high-voltage test

  • Enables coaxial measurements up to 10,000 V and 300 A pulsed (600 A in a parallel configuration) with a single touchdown
  • Even distribution of high current with innovative multi-fingertip design
  • Compatible with Tesla 200/300 mm power device characterization system
  • Reduced measurement time by testing both high-voltage and high-current conditions with a single touchdown
  • Accurate characterization of a wide range of pad sizes and test currents, with minimum pad damage and contact resistance
  • Safe, reliable and repeatable high-current/voltage measurements over a wide temperature range (from -55°C to +300°C)

 

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Description

Ultra High Power Probe

High Current ProbeFormFactor Beaverton Ultra-High-Power Probe

UHP PROBE

FormFactor Beaverton Ultra-High-Power Probe (UHP), a high-voltage parametric probe, handles both high voltage (up to 10,000 V) and high current (up to 600 A) at a wide temperature range (-55ºC to 300ºC). The UHP achieves full I-V characterization with one setup and one touchdown. Together with Tesla on-wafer power device characterization system, the UHP fully utilizes the high-voltage/current capability of Agilent B1505A and N1265A Ultra High Current Expanders.
  • Coaxial measurements up to 10,000 V and 300 A pulsed (20A DC), without the need for multiple probes and multiple measurement setup changes
  • Innovative multi-fingertip design to achieve even distribution of current and minimize pad damage
  • Probe current can be doubled up to 600 A when using double probe configuration
  • Highly reliable, stable and repeatable measurements with Agilent B1505A and N1265A Ultra High Current Expander.

UHP Probe Holder

Maximum voltage 10,000 V DC at 200°C, 8,000 V at 300°C
Maximum current  300 A pulse (600 A in a parallel configuration) / 20 A DC
Connector type High-voltage Banana (4 mm)
Operating temperature range -55°C to 300°C
Length of cable 1 m
Probe residual resistance ≤ 5 mΩ
Probe insulation resistance > 10 TΩ at 25ºC (chuck temperature)
> 3 TΩ at 200ºC (chuck temperature)
> 1 TΩ at 300ºC (chuck temperature)
Positioner compatibility SUMMIT™ RF positioners

Ultra High-Power (UHP) Key Features

  • Enables coaxial measurements up to 10,000 V and 300 A pulsed (600 A in a parallel configuration) with a single touchdown
  • Even distribution of high current with innovative multi-fingertip design
  • Compatible with Tesla 200/300 mm power device characterization system
  • Reduced measurement time by testing both high-voltage and high-current conditions with a single touchdown
  • Accurate characterization of a wide range of pad sizes and test currents, with minimum pad damage and contact resistance
  • Safe, reliable and repeatable high-current/voltage measurements over a wide temperature range (from -55°C to +300°C).

UHP Probe Tips

 Typical contact resistance on AlSiCu  < 2 mΩ (AlSiCu metal layer) for 12 fingers
< 3 mΩ (AlSiCu metal layer) for 8 fingers tip
< 6 mΩ (AlSiCu metal layer) for 4 fingers tip
< 30 mΩ (AlSiCu metal layer) for 1 fingers tip
Tip material Tungsten
Recommended range of overtravel  125-250 µm
Scrub ~150 µm (at 300 µm overtravel)
Finger width Approximately 250 µm
Finger pitch 650 µm
Probe tip layouts 12 fingers (300 A) 7400 µm width
8 fingers (200 A) 4800 µm width
4 fingers (100 A) 2200 µm width
1 finger (25 A) 250 µm width
FormFactor Beaverton Ultra High Power Probe

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