Description
Overview of Cascade PLC50 Probe Station
The Cascade PLC50 is a versatile 100 mm manual cryogenic probe system designed to meet the needs of advanced research and laboratory testing. Engineered for affordability without compromising performance, the PLC50 allows researchers to perform wafer and die-level characterization at cryogenic temperatures as low as 77 K with liquid nitrogen, or below 7 K when using liquid helium. Its flexibility and precision make it an essential tool for semiconductor, MEMS, superconducting, and optoelectronic device testing.
Flexible Cryogenic Probing Capability
Supporting wafers up to 100 mm or single dies, the PLC50 offers unmatched flexibility for small-scale device characterization. Researchers can configure the system with up to six positioners inside the vacuum chamber, enabling a wide range of measurements, including I-V, C-V, RF, MEMS, and optoelectronic testing. The ability to probe under atmospheric conditions with the chamber lid open adds extra convenience for initial setup and quick checks.
Stability and Accuracy in Measurements
The PLC50 ensures measurement reliability through its independently cooled cold shield, short and stable probe arms, and solid vibration-isolated frame. This setup provides excellent repeatability, high accuracy, and ice-free probing conditions even at deep cryogenic levels. By minimizing noise and mechanical drift, the system enables confident evaluation of sensitive devices.
Ergonomic and High-Throughput Operation
Designed with user comfort in mind, the PLC50 features a hinged topside lid, straightforward microscope operation, and quick DUT exchange. Independent control of the chuck stage and positioners allows for fast manual step-and-repeat wafer testing, while simultaneous probe contacting and separation improve throughput for multi-contact experiments.
Applications of Cascade PLC50
- Semiconductor research at cryogenic levels.
- Superconductor device evaluation.
- MEMS and optoelectronic testing.
- DC, RF, and C-V measurements.
- R&D in advanced materials and nanotechnology.
Technical Specifications Table
| Feature | Specification |
| Wafer Size | Up to 100 mm or single dies |
| Temperature Range | 77 K (liquid nitrogen) to < 7 K (liquid helium) |
| Positioners | Up to six inside vacuum chamber |
| Probing Conditions | Vacuum, ice- and condensation-free |
| Cold Shield | Independently cooled for stable measurements |
| Measurement Types | I-V, C-V, RF, MEMS, OPTO |
| Stage Control | Independent linear chuck stage and positioners |
| Design Features | Hinged lid, ergonomic microscope access, vibration isolation |
Click here to learn more about similar products from FormFactor Beaverton Inc.
