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Introducing the FormFactor CM300xi 300 mm semi-/ fully-automated probe system
CM300xi Overview
Best-in-class measurement performance at a high level of automation in the lab*
The CM300xi probe station meets the measurement challenges brought on by extremely complex environments, such as unattended testing on small pads over time and at multiple temperatures. Best-in-class measurement performance is achieved for a wide range of applications in an EMI-shielded, light-tight and moisture-free test environment. Thermal management enhancements and lab automation capabilities result in improved yields and faster time to data.
The CM300xi supports Contact Intelligence™ – a unique technology which enables autonomous semiconductor test. A powerful combination of innovative system design and state of the art image processing provides an operator-independent solution to achieve highly-reliable measurement data at any time and temperature.
With the material handling unit, the CM300xi probe station combines fully-automated wafer test with highest accuracy and flexibilty. The system can handle up to fifty 200 or 300 mm wafers provided in SEMI-standard wafer cassettes
Key Features
Flexibility
DC, AC and RF/microwave device characterization, 1/f, WLR, FA and design debug
Full thermal range of -60°C to +300°C
Usage of manual and motorized positioners, probe cards within EMI-shielded environment
Upgrade path to meet your future needs
Stable and repeatable measurements over a wide thermal range
High accuracy and repeatability
Reliable and repeatable contact
Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
Advanced EMI-shielding with PureLine and AttoGuard technologies available
Superior low-leakage and low-noise measurements
Safe and accurate hands-off testing
Minimizes settling times for efficient measurements over full thermal range
Easy manual wafer loading
Chuck mounted on rollout stage that can be opened manually
Enables full access to the chuck and the auxiliary sites
For fast and safe manual loading and unloading of wafers
3D Manual Controls
Virtual Platen Lift and XY knobs at front
Intuitive, and precise movement of chuck in X, Y, and Z-direction
Platen Lift enables extremely rapid and intuitive way in performing many alignment tasks like setting up the contact height
ntact Intelligence Technology
High thermal stability components
On-axis probe-to-pad alignment
Automated temperature ramp
Soak time management
Enables CM300xi to sense, learn and react to multiple temperatures and small pad layouts
Provides the most accurate probe to pad alignment
Thermal Measurements
Wide range of extremly performant, reliable thermal chuck systems from ATT
Flexibility from hot only to full thermal range of -60°C to +300°C
Up to 25% lower air consumption (CDA) than other systems in the market (300l/min) with no compromise in transition times
Up to 15% faster transition times than other systems in the market
Patented MicroVac™ and FemtoGuard™ Technologies, providing ultra-low noise measurements and controlled leakage, low residual capacitance for repeatability and advanced measurement accuracy and speed
Field-upgradeable: grows with your needs
Automated test
Thermally induced drift can be automatically re-aligned for 30 μm pads in a temperature range from -40°C to 150°C (the effective temperature range depends on pad size, probe card holder and probe card)
Enables unattended tests on small pads down to 30 μm over time and at multiple temperatures
Faster time to data
Key Benefits
Higher efficiency and lower cost of test
Scalable from semi-automated operation to fully-automated prober or dual-prober system
High accuracy and repeatability
Superior low-leakage and low-noise measurements
Safe and accurate hands-off testing with reliable and repeatable contact
Automated test
Contact Intelligence enables unattended tests on small pads
•Thermally induced drift can be automatically corrected, enabing automated temperature transitions over the full temperature range using VueTrack or ReAlign (the effective temperature range and minimum obtainable pad size depend on probe card and probe card holder or positioner used)
Test productivity
Fast delivery of a wide variety of precise model parameters to enhance process and device development
Flexibility
DC, AC and RF/microwave device characterization, 1/f, WLR, FA and design debug
Full thermal range of -60°C to +300°C, supported by high thermal stability design
Usage of manual and motorized positioners, probe cards within EMI-shielded environment
Trust the Experts at ACA TMetrix Inc.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
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