Discount Products: Look through products available for a 25% – 50% discount in 2020. The items provided on a first come, first serve basis. View Discounted Products
Discount Products: Look through products available for a 25% – 50% discount in 2020. The items provided on a first come, first serve basis. View Discounted Products
Best-in-class measurement performance at a high level of automation in the lab*
The CM300xi probe station meets the measurement challenges brought on by extremely complex environments, such as unattended testing on small pads over time and at multiple temperatures. Best-in-class measurement performance is achieved for a wide range of applications in an EMI-shielded, light-tight and moisture-free test environment. Thermal management enhancements and lab automation capabilities result in improved yields and faster time to data.
The CM300xi supports Contact Intelligence™ – a unique technology which enables autonomous semiconductor test. A powerful combination of innovative system design and state of the art image processing provides an operator-independent solution to achieve highly-reliable measurement data at any time and temperature.
With the material handling unit, the CM300xi probe station combines fully-automated wafer test with highest accuracy and flexibilty. The system can handle up to fifty 200 or 300 mm wafers provided in SEMI-standard wafer cassettes
Higher efficiency and lower cost of test | Scalable from semi-automated operation to fully-automated prober or dual-prober system |
High accuracy and repeatability | Superior low-leakage and low-noise measurements Safe and accurate hands-off testing with reliable and repeatable contact |
Automated test | Contact Intelligence enables unattended tests on small pads •Thermally induced drift can be automatically corrected, enabing automated temperature transitions over the full temperature range using VueTrack or ReAlign (the effective temperature range and minimum obtainable pad size depend on probe card and probe card holder or positioner used) |
Test productivity | Fast delivery of a wide variety of precise model parameters to enhance process and device development |
Flexibility | DC, AC and RF/microwave device characterization, 1/f, WLR, FA and design debug Full thermal range of -60°C to +300°C, supported by high thermal stability design Usage of manual and motorized positioners, probe cards within EMI-shielded environment |
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
X-Y Stage | |
Travel XY | 301 mm x 501 mm (11.9 in. x 19.7 in.) |
Resolution | 0.2 µm (0.008 mils) |
Repeatability | ≤ 1 µm (0.04 mils) |
Accuracy | Standard mode: ≤ 2 µm (0.08 mils), Precision mode: ≤ 0.3 μm (0.012 mils) |
Speed | 50 mm/sec (2 in./sec) |
Bearings | Precision balls bearings |
Motor-drive system | High-performance micro stepper motor |
Feedback system | Ceramic ultra-low thermal expansion linear encoder |
Z Stage | |
Travel | 10.0 mm (.39 in.) |
Resolution | 0.2 µm (0.008 mils) |
Repeatability | ≤ 1 µm (0.04 mils) |
Accuracy | ≤ 2 µm (0.08 mils) |
Speed | 20 mm/sec (0.8 in./sec) |
Lifting capacity | 20 kg (44 lb.) |
Probe-force deflection (measured at the chuck edge) | ≤ 0.0007 µm/µm slope per 10 kg load (0.0007 in./ in./22 lb) |
Theta Stage | |
Travel |
± 3.75° |
Resolution | 0.2 µm (0.008 mils)*; 0.00008° |
Repeatability | ≤ 1 µm (0.04 mils)*; ≤ 0.0004° |
Accuracy of fine correction | ≤ 2 µm (0.08 mils)*; ≤ 0.0008° |
Accuracy of large movement (>2°) | ≤ 5 µm (0.20 mils)*; ≤ 0.0019° |
* Measured at edge of 300 mm chuck
Datasheet