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Introducing the FormFactor Cascade PM8 200 mm manual open probe system
Cascade PM8 manual probe system from FormFactor is designed to provide a highly stable, ergonomic and flexible probing platform for precise analytical probing applications up to 200 mm, such as device and wafer characterizations, failure analysis (FA), RF/mmW/sub-THz probing and MEMS. The innovative fine-glide chuck stage offers both wide-range coarse movement and micrometer-level fine movement, simplifying precision measurements. The granite plate can withstand any thermal or mechanical influences and ensures complete system stability. The solid structure of the PM8 is ideal for all RF applications up to sub-THz range, supported by WinCal XE™ calibration software, including LRRM, LRM+, NIST style TRL and hybrid calibration methods.
The unique movable microscope bridge option provides an easy and ergonomic coarse and fine adjustment of the observation system of up to 200 mm, making all FA and inspection tasks and wafer-level reliability (WLR) tests easy. PM8 can be upgraded with a variety of accessories, such as laser cutters and the remote-controlled manual positioners for FA applications and chucks with special designs for calibration substrates and burnishing pads for high-frequency applications. Probe cards can be easily used for testing, and packaged parts can be tested with minimum setup adjustment.
Key Features
Superior Mechanics
Highly stable granite base
Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
1 µm repeatable separation stroke
Excellent measurement accuracy and repeatability
Fast navigation and high-precision probe positioning
High Flexibility
Re-configurable for DC, RF, mmW, FA, WLR and more
Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
40 mm platen height adjustability
Upgrade path to meet your future needs
Fast transition between wafer and package test
Ease of use
Low-profile, straightforward design
Easy and ergonomic operation
Double-side option
Front or backside instrumentation, e.g.: Integrating Sphere, Fiber setup, Pressure Module
Front or backside probing capability
Access to top side and bottom side of device under test (DUT)
Highly accurate light measurement
Key Benefits
Flexibility
• Ideal for FA, WLR, RF/mmW, sub-THz and MEMS applications
• Extensive accessories available, such as laser cutters and a wide range of equipment for RF test
• Compatible with probe cards and/or packaged parts
Stability
• Fine-glide chuck stage on highly-stable granite base
• Ideal for sub-micron probing
• Active platen cooling for thermal stability
• Solid structure
• Superior vibration attenuation
Ease of use
• Low-profile, straightforward design for easy and
• Simple and easy to use microscope
• Simple and easy to use microscop
Trust the Experts at ACA TMetrix Inc.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
Specifications
Chuck Stage
Travel
Coarse: 200 mm x 200 mm (8.0 inch x 8.0 inch)
Fine: 10 mm x 10 mm (0.4 inch x 0.4 inch)
Fine-travel resolution
< 1.0 µm (0.04 mils) (~0.8 mm/rev)
Feedback system
Visual position indicator for fine movement with micrometer screw
Z load stroke
8 mm
Z load stroke repeatability
≤ 2 µm
Theta travel
± 6°
Motor-drive system
High-performance micro stepper motor
Theta resolution
< 6.75 x 10-3 (< ± 5 µm at wafer edge)
Manual Microscope Stage (Fixed Bridge)
Travel range
50 mm x 50 mm (2.1 inch x 2.1 inch) / 100 mm x 100 mm (4.0 inch x 4.0 inch)
