Hioki POWER METER PW3337
Description
Cascade CM300xi Probe System Overview
The Cascade CM300xi is a state-of-the-art 300 mm semi- or fully-automated probe system designed to deliver precise and repeatable measurements across a wide range of semiconductor applications. Whether used for DC, RF, or microwave characterization, failure analysis, or wafer-level reliability testing, the CM300xi ensures best-in-class performance under even the most demanding lab conditions.
Built with Contact Intelligence™ technology, the CM300xi enables autonomous testing through advanced image processing and intelligent alignment algorithms. This operator-independent approach guarantees consistent data quality across multiple temperatures and pad layouts. Its robust thermal range of -60°C to +300°C, combined with EMI-shielded, moisture-free MicroChamber® technology, provides an environment optimized for low-noise and high-accuracy measurements.
The modular system architecture allows users to start with a semi-automated configuration and upgrade to full automation as requirements grow. With the material handling unit (MHU), the CM300xi can test up to fifty 200 or 300 mm wafers automatically, making it an ideal solution for labs requiring efficiency, throughput, and reliable results.
The platform integrates seamlessly with Velox control software and the modern Velox Dash™ touchscreen interface, minimizing training requirements while enhancing usability. Optional features like ReAlign™ probe-to-pad technology ensure accurate contact for probe cards that do not allow top-down visibility.
From accelerated device development to highly stable long-duration testing, the CM300xi delivers unmatched versatility, accuracy, and scalability for advanced semiconductor testing.
Cascade CM300xi Technical Highlights
| Feature | Specification / Capability |
| System Type | Semi-/Fully-automated 300 mm probe system |
| Applications | DC, AC, RF, microwave, WLR, FA, debug |
| Thermal Range | -60°C to +300°C (TopHat or IceShield) |
| Contact Technology | Contact Intelligence™ with automated alignment |
| Chamber | Moisture-free, EMI-shielded, MicroChamber® |
| Automation | Handles up to 50 wafers (200/300 mm) with SEMI cassettes |
| Measurement Accuracy | Submicron repeatability with low-noise MicroVac™ & FemtoGuard™ |
| Optional Features | ReAlign™ probe-to-pad, modular upgrade paths |
| Control Software | Velox & Velox Dash™ touchscreen interface |
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