Hioki POWER METER PW3337
Description
Cascade EPS200RF Probe System for High-Frequency Measurements
The Cascade EPS200RF 200 mm Manual Probe System is a purpose-built platform designed to deliver best-in-class RF and microwave measurements up to 67 GHz. Built on the proven PM8 system, the EPS200RF provides a complete and reliable solution for engineers and researchers working on advanced semiconductor device characterization.
Complete RF Measurement Package
This system includes all the hardware, probes, cables, substrates, and WinCal XE calibration software, making it a ready-to-use package for high-frequency testing. With the ability to probe contact pads as small as 25 µm x 35 µm, the EPS200RF ensures reliable and accurate testing across a wide range of devices and materials.
Flexible Probe Technologies
The Cascade EPS200RF integrates three probe technologies tailored for different applications:
- Infinity Probe: Best for Aluminum (Si) processes.
- ACP Probe: Ideal for Gold (III-V) processes.
- |Z| Probe: A robust solution with long lifetime for general RF probing.
This flexibility guarantees consistent and precise contact with excellent crosstalk performance between 26 GHz and 67 GHz.
Precision Contact and Stability
The EPS200RF achieves ±3 μm chuck planarity and a 500 μm platen stroke with ≤±1 μm accuracy, ensuring repeatable and stable contact. Its precise probe alignment system delivers consistent contact force and controlled overtravel, minimizing errors and enhancing data reliability.
Advanced Calibration with WinCal XE
Accurate calibration is key to RF success, and the EPS200RF comes with WinCal XE, the industry’s leading on-wafer RF measurement calibration software. Supporting 1-, 2-, 3-, and 4-port calibration algorithms, WinCal XE automates setup and monitoring, ensuring fast, reliable, and accurate S-parameter measurements with simplified data reporting.
Optimized for RF and mmW Applications
From research labs to device development environments, the EPS200RF is the ideal solution for precise RF probing. Its combination of robust mechanics, advanced calibration, and flexible probe options provides engineers with the confidence to perform highly accurate and repeatable measurements at millimeter-wave frequencies.
Technical Specifications
| Feature | Details |
| Wafer Size | 200 mm |
| Frequency Range | Up to 67 GHz |
| Probe Technologies | Infinity Probe, ACP Probe, |
| Pad Size Capability | As small as 25 µm x 35 µm |
| Chuck Planarity | ±3 μm |
| Platen Stroke Accuracy | 500 μm stroke with ≤±1 μm accuracy |
| Crosstalk Performance | Excellent accuracy across RF range |
| Calibration Software | WinCal XE (1-, 2-, 3-, 4-port algorithms) |
| Measurement Type | On-wafer RF and S-parameter characterization |
| Package Inclusions | Hardware, probes, cables, substrates, and calibration software |
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