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Cascade PMC200 Cryogenic Probe Station

Cascade PMC200 Cryogenic Probe Station

Cascade PMC200 Cryogenic Probe Station – advanced manual solution for wafer probing down to cryogenic levels with unmatched flexibility and accuracy.

Key Features:

  • 200 mm cryogenic manual probe station with probes inside chamber
  • Supports wafers up to 200 mm or single dies
  • Probe cards and up to eight positioners for advanced measurements
  • Operates with liquid nitrogen (77 K) or helium (< 7 K)
  • Optional microscope bridge and 300 mm wafer upgrade
  • Front-loading capability for fast and ergonomic device changes
  • Independently cooled cold shield for stable cryogenic performance
  • Precise probe positioning with vibration-isolated frame
  • Covers DC, RF, MEMS, OPTO, and superconducting device tests

 

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Description

Cascade PMC200 Cryogenic Probe Station for Advanced Research

The Cascade PMC200 Cryogenic Probe Station is a highly precise manual wafer probing solution designed for advanced laboratory and industrial environments. Supporting wafers and substrates up to 200 mm, it enables cryogenic testing in high vacuum environments down to 77 K with liquid nitrogen or below 7 K with liquid helium. This system delivers flexibility, stability, and ease of use for a wide range of applications, including DC, RF, MEMS, superconducting, and optoelectronic device characterization.

Flexibility for Advanced Testing

The PMC200 accommodates different substrate carriers for wafers up to 200 mm or single dies. With probe cards or up to eight positioners, it adapts to complex testing needs. Optional accessories, such as black bodies and optical motion analysis tools, expand its functionality, while future-proof options like microscope bridges and 300 mm wafer upgrades ensure long-term value.

Stability and Accuracy in Cryogenic Conditions

Engineered with an independently cooled cold shield, short probe arms, and a vibration-isolated frame, the PMC200 guarantees stability during sensitive measurements. Ice- and condensation-free probing ensures reliable results at both 77 K and < 7 K. Its superior vibration attenuation and stable imaging capabilities make it suitable for high-resolution microscopy.

Ergonomic Operation with High Throughput

Front-loading capability simplifies device exchange while intuitive manual drives provide easy, comfortable operation. The independent chuck and positioner control allow quick, manual step-and-repeat testing across an entire wafer. With simultaneous probe contact and separation, measurement throughput is significantly enhanced.

This combination of flexibility, precision, and ergonomic design positions the Cascade PMC200 Cryogenic Probe Station as an ideal choice for both cutting-edge research and demanding industrial testing.

Technical Highlights Table

Specification Details
Wafer Size Capacity Up to 200 mm (upgradeable to 300 mm)
Operating Temperature 77 K (LN2) to < 7 K (LHe)
Positioners Up to 8, plus probe cards
Measurement Types DC, RF, MEMS, OPTO, superconductors
Probe Environment High vacuum with cryogenic cooling
Loading Method Front-loading with load door
Cold Shield Independently cooled for stability
Frame Design Solid, vibration-isolated
Microscope Options High-resolution with optional bridge
Accessories Black bodies, optical motion tools

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