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FormFactor Cascade PAC200 200 mm semi-automated cryogenic probe system

FormFactor Cascade PAC200 200 mm semi-automated cryogenic probe system

  • Flexibility
    • Different substrate carriers for wafers up to 200 mm or single dies
    • Probe cards and/or up to eight positioners
    • Use with liquid nitrogen or helium, depending on the target temperature
  • Stability
    • Probe positioners placed inside vacuum chamber
    • Short and stable probe arms
    • Solid station frame with built-in vibration-isolation
    • Optional microscope bridge
    • Precise probe positioning
  • Ease of Use
    • Joystick controller
    • Manual probe positioners with rotary feed-throughs
    • Front loading capability through load door
    • Comfortable and easy operation

 

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Introducing the FormFactor Cascade PAC200 200 mm semi-automated cryogenic probe system

The Cascade PAC200 from FormFactor is the ideal solution for automatic testing of wafers and substrates up to 200 mm in a cryogenic environment down to 77 K with liquid nitrogen or below 20 K with liquid helium.

It supports a wide range of applications, including DC and RF measurements of the latest silicon, compound semiconductor and superconductor devices. The probe platen is designed to mount probe cards or up to eight vacuum-type positioners on magnetic feet. To reduce heat entrance, probes or probe cards are thermally anchored to the cryogenic shield. A highresolution video microscope with 50 mm x 50 mm travel range is mounted either on a microscope mount with swivel or on a microscope bridge for vibration-sensitive test applications and additional test instruments.

The PAC200 is equipped with a stable vibration isolating frame. The chuck and the motorized chuck stage with 200 mm x 200 mm X-Y travel, theta and Z-axis are located inside the high-vacuum chamber. Up to eight vacuum-type positioners can be easily operated from outside of the chamber via vacuum-tight mechanical feedthrough drives andcardan shafts.

The PAC200 can be customized with a number of instruments, including various video microscopes, optical topology measurement tools and black bodies for exposure of the DUT with controlled IR radiation.

 

FormFactor Cascade PAC200 200 mm semi-automated cryogenic probe system



FormFactor Cascade PAC200 200 mm semi-automated cryogenic probe system

Key Features

Flexibility

  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Use with liquid nitrogen or helium, depending on the target temperature
  • Accessories available, such as black bodies and optical motion analysis tools
  • Optional upgrade for 300 mm wafer
  • Designed for industrial environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
  • Ideal for small structures

Stability

  • Ice- and condensation-free probing down to 77 K (liquid nitrogen) or below 20 K (liquid helium)
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation
  • Stable image quality for high-resolution microscopes

Ease of Use

  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Front loading capability through load door
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT

 



Key Benefits

Flexibility • System is customized to user’s requirements
• Different substrate carriers for wafers up to 200 mm or single dies
• Velox™ probe station control software
• Wide range of measurements (I-V, C-V, two-port, multi-port and differential RF)
• RF tests supported by a wide range of probes and calibration tools, such as calibration substrates and
WinCal XE™ calibration software
• Other test equipment can be implemented (e.g. infrared sources)
Stability • Ice- and condensation-free probing down to 77K (liquid nitrogen) or below 20 K (liquid helium)
• High accuracy, ideal for small structures
• Highly stable mechanics with a stable vibration isolation table
Ease of use •Simple, straightforward design for easy and ergonomic operation
• Easy to use probe card holder for fast change of probe card

IR-imaging: detectors Focal-Plane-Arrays (IRFPA)
RF devices, e.g. HEMT electron mobility transistors
Submicron technology
Superconductors

 


FormFactor Cascade PAC200 200 mm semi-automated cryogenic probe system


Trust the Experts at ACA TMetrix Inc.

ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.

Specifications

Cryogenic Probecard

Specially designed for use in high vacuum and cryogenic conditions
Customer electronics on board possible
Easy-to-use probecard holder for fast change of probecard
Integrated in radiation shield for cooling probe needles
Needle ring for up to 120 needles
Design depends on the required electrical measurement
Coax and / or twisted-pair cabling

Automation

Two-line configuration with independent cooling of cold shield and chuck for short cool-down time
LN2 dewar with level detection and automatic refill
Automatic warm-up after testing is completed
Automatic alignment with Velox probe station control software
Interface to customer’s main program
Display and control of the whole system with FormFactor’s Cryogenic Tool
Bridge with rails for programmable movement of mounted instruments

 

Datasheet


Contact ACA TMetrix Inc.

Address

3585 Laird Road, Unit 15 & 16, Mississauga ON L5L 5Z8

Phone: 1-800-665-7301

Fax: 1-905-890-1959

Email: info@tmetrix.com

About ACA TMetrix Inc.

ACA TMetrix Inc. is a leading supplier of test instruments and design tools in Canada. For over 50 years we have provided services and support for products that are manufactured by the world's leading instrument suppliers.

TMetrix Ltd. is Part of the ACA Group of Companies. Allan Crawford Associates (ACA), is one of Canada's largest distributors of electronic components, test equipment, and scientific solutions.

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