FormFactor Cascade PMC200 200 mm manual cryogenic probe system

Introducing the FormFactor Cascade PMC200 200 mm manual cryogenic probe system

Cascade PMC200 probe system from FormFactor is the ideal solution for testing wafers and substrates up to 200 mm in a cryogenic environment. Specially designed for laboratory requirements, it supports a wide range of measurements, including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 7 K with liquid helium. Application flexibility is ensured for DC and RF measurements of the latest silicon, compound semiconductor and superconductor devices.

The base of the PMC200 is a vibration isolated mainframe. The chuck and the chuck stage with 200 mm x 200 mm X-Y travel, theta and separation stroke are located inside the high-vacuum chamber that contains flanges for vacuum-tight mechanical feedthrough drives. Thus the chuck and up to eight vacuum-type positioners can be easily operated from outside of the chamber via cardan shaft. The high-vacuum pump stand with turbo-molecular-pump (TMP) ensures ice- and condensation-free probing.

To reduce heat entrance, probes are cooled by flexible copper braids connected with the cryo shield. A high-resolution video microscope with 50 mm x 50 mm travel range is mounted either on a microscope bridge for vibration-sensitive test instruments or on a remote controlled lift.

The PMC200 can be customized with various instruments, such as various video microscopes, laser cutters and optical topology measurement tools, or black bodies for exposure of the DUT with controlled IR radiation.

Key Features

Flexibility

• Different substrate carriers for wafers up to 200 mm or single dies
• Probe cards and/or up to eight positioners
• Use with liquid nitrogen or helium, depending on the target temperature
• Accessories available, such as black bodies and optical motion analysis tools
• Designed for industrial environments
• Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

Stability

• Independently cooled cold shield
• Probe positioners placed inside vacuum chamber
• Short and stable probe arms
• Solid station frame with built-in vibration-isolation
• Optional microscope bridge
• Optional upgrade for 300 mm wafer
• Ice- and condensation-free probing down to 77 K (liquid nitrogen) or below 7 K (liquid helium)
• Precise probe positioning
• Excellent measurement accuracy and repeatability
• Superior vibration attenuation
• Stable image quality for high-resolution microscopes

Ease of Use

• Intuitive, manual drives
• Front loading capability through load door
• Comfortable and easy operation
• Quick and ergonomic change of DUT

High measurement throughput

• Independent control of linear chuck stage and positioners
• Contact/separation stroke for chuck
• Fast, manual step-and-repeat testing of the whole wafer
• Simultaneous contacting and separation of all probes

Key Benefits

Specifications