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The PLC50 is the most cost-effective and simple, yet highly-precise probing solution for wafers and substrates up to 80 mm at cryogenic temperatures. Specially designed for laboratory requirements, it supports a wide range of applications, including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 7 K with liquid helium. Application flexibility is ensured for DC and RF measurements of the latest silicon, compound semiconductor and superconductor devices. RF tests are supported by a wide range of probes, calibration substrates and other accessories, as well as WinCal XE™ calibration software. The unique LRRM, LRM+, NIST-style TRL and hybrid calibration methods are available with the WinCal XE wafer-level calibration and measurement software.
The PLC50 is equipped with a stable vibration isolating frame. The high-vacuum chamber with a hinged topside lid and an optical window made of quartz glass contains flanges for vacuum-tight mechanical feedthrough drives. Thus the chuck and up to six vacuum-type positioners can be easily operated from outside via cardan shaft. The high-vacuum pumping system consists of a wide-range Turbo-Molecular Pump (TMP), a diaphragm forepump, and a full-range vacuum gauge. The independently-cooled cryogenic shield ensures ice- and condensation-free probing.
Key Features
Flexibility
Different substrate carriers for wafers up to 100 mm or single dies
Up to six positioners
Use with liquid nitrogen or helium, depending on the target temperature
Probing with an open chamber lid possible under atmospheric condition
Specially designed for laboratory environments
Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
Stability
Independently cooled cold shield
Probe positioners placed inside vacuum chamber
Short and stable probe arms
Solid station frame with built-in vibration-isolation
Ice- and condensation-free probing down to 77 K (liquid nitrogen) or below 7 K (liquid helium)
Precise probe positioning
Excellent measurement accuracy and repeatability
Superior vibration attenuation
Ease of Use
Ergonomic and straightforward design
Simple microscope operation
Hinged topside lid
Comfortable and easy operation
Quick and ergonomic change of DUT
Topside access to probes and samples
High measurement throughput
Independent control of linear chuck stage and positioners
Contact/separation stroke for probe platen
Fast, manual step-and-repeat testing of the whole wafer
Simultaneous contacting and separation of all probes
Key Benefits
Applications: IV/CV, RF/mmW, Opto, MEMS
Cryogenic Systems
The use of on-wafer superconducting materials, other novel materials and traditional semiconductors at cryogenic temperatures (below about 123K, or -150°C) has risen markedly in recent years. Inventive new sensors take advantage of unique material properties at very low temperatures to detect a wide variety of physical phenomena such as infrared radiation, magnetic fields, x-rays, and more, for application in many fields such as health care, defense, industrial automation, and astronomy. Learn More about Cryogenic Systems
Trust the Experts at ACA TMetrix Inc.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
Specifications
Chuck Stage
X-Y travel
50 mm x 50 mm, optional 80 mm x 80 mm
Resolution
5 μm
Manipulation
Linear, from outside the chamber via rotary feed thru drives
Probe Platen
Platen space
Universal platen for up to six VCP110 positioners
Z contact / separation
250 μm
Manipulation
From outside the chamber
Microscope
Travel
Swivel mechanism for moving the microscope in a safe rest position for chamber opening
