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The PLC50 is the most cost-effective and simple, yet highly-precise probing solution for wafers and substrates up to 80 mm at cryogenic temperatures. Specially designed for laboratory requirements, it supports a wide range of applications, including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 7 K with liquid helium. Application flexibility is ensured for DC and RF measurements of the latest silicon, compound semiconductor and superconductor devices. RF tests are supported by a wide range of probes, calibration substrates and other accessories, as well as WinCal XE™ calibration software. The unique LRRM, LRM+, NIST-style TRL and hybrid calibration methods are available with the WinCal XE wafer-level calibration and measurement software.
The PLC50 is equipped with a stable vibration isolating frame. The high-vacuum chamber with a hinged topside lid and an optical window made of quartz glass contains flanges for vacuum-tight mechanical feedthrough drives. Thus the chuck and up to six vacuum-type positioners can be easily operated from outside via cardan shaft. The high-vacuum pumping system consists of a wide-range Turbo-Molecular Pump (TMP), a diaphragm forepump, and a full-range vacuum gauge. The independently-cooled cryogenic shield ensures ice- and condensation-free probing.
Applications: IV/CV, RF/mmW, Opto, MEMS
The use of on-wafer superconducting materials, other novel materials and traditional semiconductors at cryogenic temperatures (below about 123K, or -150°C) has risen markedly in recent years. Inventive new sensors take advantage of unique material properties at very low temperatures to detect a wide variety of physical phenomena such as infrared radiation, magnetic fields, x-rays, and more, for application in many fields such as health care, defense, industrial automation, and astronomy. Learn More about Cryogenic Systems
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
|X-Y travel||50 mm x 50 mm, optional 80 mm x 80 mm|
|Manipulation||Linear, from outside the chamber via rotary feed thru drives|
|Platen space||Universal platen for up to six VCP110 positioners|
|Z contact / separation||250 μm|
|Manipulation||From outside the chamber|
|Travel||Swivel mechanism for moving the microscope in a safe rest position for chamber opening|
|Type||Video zoom microscope|
|Magnification||0.38x to 2.6x|
|Resolution||240 lp/mm to 721 lp/mm|
|Field of view||12.8 mm x 17.1 mm to 1.8 mm x 2.4 mm|
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