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FormFactor PLC50

FormFactor PLC50

100 mm manual cryogenic probe system

  • Specially designed for laboratory environments
  • Different substrate carriers for wafers up to 100 mm or single dies
  • Probe positioners placed inside vacuum chamber
  • Excellent measurement accuracy and repeatability
  • Simple microscope operation
  • Comfortable and easy operation
  • Fast, manual step-and-repeat testing of the whole wafer
  • Simultaneous contacting and separation of all probes

 

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Introducing the FormFactor PLC50

The PLC50 is the most cost-effective and simple, yet highly-precise probing solution for wafers and substrates up to 80 mm at cryogenic temperatures. Specially designed for laboratory requirements, it supports a wide range of applications, including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 7 K with liquid helium. Application flexibility is ensured for DC and RF measurements of the latest silicon, compound semiconductor and superconductor devices. RF tests are supported by a wide range of probes, calibration substrates and other accessories, as well as WinCal XE™ calibration software. The unique LRRM, LRM+, NIST-style TRL and hybrid calibration methods are available with the WinCal XE wafer-level calibration and measurement software.

The PLC50 is equipped with a stable vibration isolating frame. The high-vacuum chamber with a hinged topside lid and an optical window made of quartz glass contains flanges for vacuum-tight mechanical feedthrough drives. Thus the chuck and up to six vacuum-type positioners can be easily operated from outside via cardan shaft. The high-vacuum pumping system consists of a wide-range Turbo-Molecular Pump (TMP), a diaphragm forepump, and a full-range vacuum gauge. The independently-cooled cryogenic shield ensures ice- and condensation-free probing.

 

 

FormFactor PLC50



FormFactor PLC50

Key Features

Flexibility

  • Different substrate carriers for wafers up to 100 mm or single dies
  • Up to six positioners
  • Use with liquid nitrogen or helium, depending on the target temperature
  • Probing with an open chamber lid possible under atmospheric condition
  • Specially designed for laboratory environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

Stability

  • Independently cooled cold shield
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Ice- and condensation-free probing down to 77 K (liquid nitrogen) or below 7 K (liquid helium)
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation

Ease of Use

  • Ergonomic and straightforward design
  • Simple microscope operation
  • Hinged topside lid
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT
  • Topside access to probes and samples

High measurement throughput

  • Independent control of linear chuck stage and positioners
  • Contact/separation stroke for probe platen
  • Fast, manual step-and-repeat testing of the whole wafer
  • Simultaneous contacting and separation of all probes


Key Benefits

Applications: IV/CV, RF/mmW, Opto, MEMS

 

Cryogenic Systems

The use of on-wafer superconducting materials, other novel materials and traditional semiconductors at cryogenic temperatures (below about 123K, or -150°C) has risen markedly in recent years. Inventive new sensors take advantage of unique material properties at very low temperatures to detect a wide variety of physical phenomena such as infrared radiation, magnetic fields, x-rays, and more, for application in many fields such as health care, defense, industrial automation, and astronomy.  Learn More about Cryogenic Systems

 


FormFactor PLC50


Trust the Experts at ACA TMetrix Inc.

ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.

Specifications

Chuck Stage
X-Y travel 50 mm x 50 mm, optional 80 mm x 80 mm
Resolution 5 μm
Manipulation Linear, from outside the chamber via rotary feed thru drives
Probe Platen
Platen space Universal platen for up to six VCP110 positioners
Z contact / separation 250 μm
Manipulation From outside the chamber
Microscope
Travel Swivel mechanism for moving the microscope in a safe rest position for chamber opening
Focus Manual drive
Type Video zoom microscope
Zoom 7x
Magnification 0.38x to 2.6x
Resolution 240 lp/mm to 721 lp/mm
Field of view 12.8 mm x 17.1 mm to 1.8 mm x 2.4 mm

See more from datasheet

 

Datasheet


Contact ACA TMetrix Inc.

Address

3585 Laird Road, Unit 15 & 16, Mississauga ON L5L 5Z8

Phone: 1-800-665-7301

Fax: 1-905-890-1959

Email: info@tmetrix.com

About ACA TMetrix Inc.

ACA TMetrix Inc. is a leading supplier of test instruments and design tools in Canada. For over 50 years we have provided services and support for products that are manufactured by the world's leading instrument suppliers.

TMetrix Ltd. is Part of the ACA Group of Companies. Allan Crawford Associates (ACA), is one of Canada's largest distributors of electronic components, test equipment, and scientific solutions.

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