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Cryogenic Systems

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    • Flexibility
      • Different substrate carriers for wafers up to 200 mm or single dies
      • Probe cards and/or up to eight positioners
      • Use with liquid nitrogen or helium, depending on the target temperature
    • Stability
      • Probe positioners placed inside vacuum chamber
      • Short and stable probe arms
      • Solid station frame with built-in vibration-isolation
      • Optional microscope bridge
      • Precise probe positioning
    • Ease of Use
      • Joystick controller
      • Manual probe positioners with rotary feed-throughs
      • Front loading capability through load door
      • Comfortable and easy operation

     

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    • Flexibility
      • Different substrate carriers for wafers up to 200 mm or single dies
      • Probe cards and/or up to eight positioners
      • Optional thermal chuck (-60°C to 300°C) and pressure regulation
    • Stability
      • Probe positioners placed inside vacuum chamber
      • Short and stable probe arms
      • Solid station frame with built-in vibration-isolation
      • Optional microscope bridge
      • Precise probe positioning
    • Ease of Use
      • Joystick controller
      • Manual probe positioners with rotary feed-throughs
      • Front loading capability through load door
    • High measurement throughput
      • Software control of chuck for fast step-and-repeat testing of the entire wafer
      • Fast step-and-repeat testing of the whole wafer

     

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    • Flexibility
      • Different substrate carriers for wafers up to 200 mm or single dies
      • Probe cards and/or up to eight positioners
      • Optional thermal chuck (-60°C to 300°C) and pressure regulation
    • Stability
      • Probe positioners placed inside vacuum chamber
      • Short and stable probe arms
      • Solid station frame with built-in vibration-isolation
      • Optional microscope bridge
      • Precise probe positioning
    • Ease of Use
      • Joystick controller
      • Manual probe positioners with rotary feed-throughs
      • Front loading capability through load door
      • Comfortable and easy operation
    • High measurement throughput
      • Software control of chuck for fast step-and-repeat testing of the entire wafer
      • Fast step-and-repeat testing of the whole wafer

     

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    • Superior Mechanics
      • Different substrate carriers for wafers up to 200 mm or single dies
      • Probe cards and/or up to eight positioners
      • Use with liquid nitrogen or helium, depending on the target temperature
    • Stability
      • Independently cooled cold shield
      • Probe positioners placed inside vacuum chamber
      • Short and stable probe arms
      • Solid station frame with built-in vibration-isolation
      • Optional microscope bridge
      • Optional upgrade for 300 mm wafer
    • Ease of Use
      • Intuitive, manual drives
      • Front loading capability through load door
      • Comfortable and easy operation
    • High measurement throughput
      • Independent control of linear chuck stage and positioners
      • Contact/separation stroke for chuck
      • Fast, manual step-and-repeat testing of the whole wafer

     

     

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    • Rapid image acquisition
    • High resolution imaging
    • SQUID sensor autotuning
    • Unattended operation
    • Sample size
    • Closed-loop scanner stage
    • Magnetic shielding
    • Magnetic field control
    • Flexible sensor integration
    • Cryogen-free

     

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    • Cryogenic Temperaturesy
      • Fully isolated experiment space for true 4K temperatures during probing
      • Cryogenic positioners to provide large travel ranges without warming up the device
    • Low Vibration
      • Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
      • A soft vacuum bellows provides a compliant mounting interface for the cryocooler
    • Configurability
      • Quick release vacuum feedthroughs for easy configurability
      • A large rectangular port for high signal capacity
      • Multiple stage feedthroughs for thermally intercepting the signals
      • Many available system options and add ons to choose from

     

     

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    • Low vibration from < 1 Hz to 1 kHz
      • Opposed bellows
      • Passive isolation
      • Active isolation (optional)
    • 4 K platform with quick access
    • 4 K electrical and fiber optic feedthroughs
    • Expandable, modular construction
    • Easy, flexible I/O
      • 8x NW50 flanges below the table
      • 8x HPD standard cable feethrough flanges on 50 K and 3 K plates
      • Cable feedthroughs on base flange above the table
      • Standard ports for DC, RF & optical fibers 8x HPD standard cable
    • Smart controls
      • Pushbutton auto cooldown from atmosphere TCP/IP control
      • Cryogen-free

     

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    • Cryogenic Temperaturesy
      • Fully isolated experiment space for true 4K temperatures during probing
      • Cryogenic positioners to provide large travel ranges without warming up the device
      • Integrated helium pot for high temperature stability of the device under test
      • Fully dry cryogen-free cooler eliminates the need for expensive helium circulation systems
      • Rapid cool liquid nitrogen option for faster cool down times
    • Low Vibration
      • Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
      • A soft vacuum bellows provides a compliant mounting interface for the cryocooler
      • Rigid support tube to direct vibrations from the cryocooler away from the sample
    • Configurability
      • Quick release vacuum feedthroughs for easy configurability
      • A large rectangular port for high signal capacity
      • Multiple stage feedthroughs for thermally intercepting the signals
      • Large experimental space provides more workroom and configurable ports
      • Many available system options and add ons to choose from

     

     

     

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  • 100 mm manual cryogenic probe system

    • Specially designed for laboratory environments
    • Different substrate carriers for wafers up to 100 mm or single dies
    • Probe positioners placed inside vacuum chamber
    • Excellent measurement accuracy and repeatability
    • Simple microscope operation
    • Comfortable and easy operation
    • Fast, manual step-and-repeat testing of the whole wafer
    • Simultaneous contacting and separation of all probes

     

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