1 800 665 7301 | info@tmetrix.com

Discount Products: Look through products available for a 25% – 50% discount in 2020. The items provided on a first come, first serve basis.
View Discounted Products

Metrology

Metrology
 
FRT – a FormFactor company – manufactures powerful surface metrology tools for various sectors such as development production and quality control. Due to the design and construction of these multi-sensor devices, FRT tools can be used for multiple applications.

Showing all 9 results


  • Highlights MicroProf® AP

    • flexible multi-sensor metrology tool for advanced packaging
    • for every process step from TSV etching, RDL/UBM/bumping to Cu nail reveal, dicing, stacking and molding
    • wafer handling unit with SEMI-standard FOUPs/FOSBs and open cassettes
    • individual configuration for your specific applications
    • retrofit on demand

     

    REQUEST A QUOTE
  • Highlights MicroProf® DI

    • High-precision optical surface inspection for semiconductor applications
    • Metrology and Inspection flexibly combined in one fully automated platform
    • Defect inspection with singleshot module, step camera and microscope station
    • Fast and reliable inspection of defects down to sub-μm range
    • Dark field micro inspection and bright field macro inspection

     

    REQUEST A QUOTE
  • Highlights MicroProf® FS

    • multi-sensor technology and hybrid metrology for MEMS and Foundries
    • customisable for a wide range of applications within the Wafer Foundry
    • standardised and customer-specific solutions
    • greatest possible flexibility
    • handling of diverse substrate types
    • powerful software for fully-automated 2D and 3D surface metrology
    • equipment Front End Module (EFEM)

     

    REQUEST A QUOTE
  • Highlights MicroProf® FS

    • fully automated 2D and 3D surface metrology for Front-End applications
    • multi-sensor technology, based on the MicroProf® 300
    • specific inline solution
    • wafer Handling Module
    • equipment Front End Module (EFEM)

     

    REQUEST A QUOTE
  • Highlights MicroProf® MHU

    • material handling unit with twin-arm robot
    • high throughput, up to 220 w/h
    • loading station for open cassettes
    • OCR reader / Pre-aligner
    • sorting function for the separation of good and bad samples
    • optional SECS/GEM interface

     

    REQUEST A QUOTE
    • optical surface metrology at different sample temperatures
    • programmable temperature control
    • from 10°C to 400°C
    • high heating and cooling rate
    • temperature stability: < 1°C
    • fully automated

     

    REQUEST A QUOTE
    • stand-alone tool
    • 415 mm x 305 mm measuring range (lateral)
    • high throughput, max. measuring speed 300 mm/sec
    • fully automated and integrated production tool (optional)
    • individually configurable
    • TTV option for double-sided measurement

     

    REQUEST A QUOTE
  • Highlights MicroProf® 200

    • stand-alone tool
    • 200 mm x 250 mm measuring range (lateral)
    • high throughput, max. measuring speed 300 mm/sec
    • the standard – several hundred systems installed worldwide
    • fully automated and integrated manufacturing device (optional)
    • individually configurable

     

    REQUEST A QUOTE
    • compact desktop tool
    • 150 mm x 100 mm measuring range (lateral)
    • high measuring speed, max. 200 mm/s
    • manual and automated measurement and evaluation
    • individually configurable
    • TTV option for double-sided measurement

     

    REQUEST A QUOTE

Showing all 9 results

Contact ACA TMetrix Inc.

Address

3585 Laird Road, Unit 15 & 16, Mississauga ON L5L 5Z8

Phone: 1-800-665-7301

Fax: 1-905-890-1959

Email: info@tmetrix.com

About ACA TMetrix Inc.

ACA TMetrix Inc. is a leading supplier of test instruments and design tools in Canada. For over 50 years we have provided services and support for products that are manufactured by the world's leading instrument suppliers.

TMetrix Ltd. is Part of the ACA Group of Companies. Allan Crawford Associates (ACA), is one of Canada's largest distributors of electronic components, test equipment, and scientific solutions.

Our Location

Top