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PureLine 3 Technology
First automated probe station to achieve -190dB spectral noise*
Plug In and Go
Integrated TestCell Power Management provides fully managed and filtered AC power to the entire system, prober and instruments
Autonomous 24/7 Operation
Up to 4x faster flicker noise thermal testing on 30 μm pads
Reduce Setup Time and Costs
Exclusive low noise site survey, and system verification services
300 mm Probe Station for Flicker Noise (1/f), Random Telegraph Signal Noise (RTN or RTS), and Phase Noise Measurements of Ultrasensitive Devices
FormFactor has enhanced it’s industry-leading CM300xi Probe Station with revolutionary technologies to meet new testing capabilities at the 5, 3, and 2 nm technology nodes, targeted for 5G and beyond applications. The new CM300xi-ULN now enables unprecedented measurement performance and achieves four significant industry firsts in the arena of on-wafer, low frequency flicker, RTN, and phase noise testing:
PureLine 3 Technology
First automated probe station to achieve -190dB spectral noise*
Plug In and Go
Integrated TestCell Power Management provides fully managed and filtered AC power to the entire system, prober and instruments
Autonomous 24/7 Operation
Up to 4x faster flicker noise thermal testing on 30 μm pads
Reduce Setup Time and Costs
Exclusive low noise site survey, and system verification services
FormFactor’s new CM300xi-ULN (Ultra Low Noise) is a revolutionary 300 mm wafer probing system designed for highly accurate flicker noise (1/f), random telegraph signal noise (RTN or RTS), and phase noise measurements of ultra-sensitive devices.
With the newly patented PureLine™ 3 technology, the ULN probing system enables up to 32x lower noise (1 kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications. By eliminating over 97% of the environmental noise experienced in previous probe systems, the CM300xi-ULN system establishes a new industry gold standard for ultra-low noise measurements.
When integrated with noise test equipment (flicker noise, RTN, phase noise), the CM300xi-ULN offers the industry’s highest test throughput, using Contact Intelligence™ with motorized probe positioners, enabling fully Autonomous DC and low frequency noise probing with multi-DUT layouts for complete hands-free 24/7 operation.
Finally, the CM300xi-ULN takes the complexity out of low noise TestCell optimization. Just plug it in and go. TestCell Power Management eliminates all ground-loop induced TestCell noise and provides fully managed and filtered AC power to the entire system, prober and instruments.
Additionally, FormFactor’s exclusive low-noise Site Survey and System Verifications significantly reduce setup costs and tool deployment time. This allows lab engineers to focus on getting good device data, that can be used to reduce the number of costly re-designs and accelerate time to market with lower development costs.
* Typical noise (dBVrms/√Hz, 1kHz to 1MHz), with prober and thermal system enabled.
Applications: Flicker Noise (1/f), Random Telegraph Noise (RTN), and Phase Noise Measurements of Ultrasensitive Devices
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
| Material handling unit | The footprint-optimized MHU301 can be configured to provide fully automated testing. It offers automated loading of the probe system with 200 mm and 300 mm SEMI spec wafers from FOUP/FOSB cassettes. The MHU301 comes with one SEMI standard load port. Manual loading of wafer fragments (> 10 mm x 10 mm), as well as full wafers, are supported through manual loading of the prober, which bypasses the MHU. |
| Wafer ID Reading | The probe system has the optional ability to automatically identify wafers. Wafers are identified by a barcode [BC 412 (SEMI T1-95 Standard] and IBM 412, OCR text [SEMI M12, M13 and M1.15 Standard], IBM, Triple and OCR-A fonts or 2D code [Data Matrix (T7 and M1.15 Standard)] at the top or bottom side of the wafer. |
Datasheet
3-Phase 4-Wire Power Quality Analyzer Compliant to IEC61000-4-30 Class S Standards and On-screen Guide to Deliver Easy Setup and Testing
| PQ3100 | main unit, clamp sensor is sold separately |
|---|---|
| PQ3100-91 | kit includes 600 A sensor × 2 and other options |
| PQ3100-92 | kit includes 600 A sensor × 4 and other options |
| PQ3100-94 | kit includes 6000 A sensor × 4 and other options |
Note: An optional current sensor is necessary to measure current or power parameters. Select from Value Kits for added savings.
DC, 0.5 Hz to 200 kHz, 3-phase 4-wire, High Precision Power Analyzer for Motor and Inverter Efficiency Analysis
| PW3390-01 | |
|---|---|
| PW3390-02 | D/A output |
| PW3390-03 | D/A output, motor analysis |
Note: PW3390 by itself does not support current and power measurements. Optional current sensor and voltage cord are necessary to measure current or power parameters. Specify inclusion of Motor analysis & D/A output upon order for factory installation. These options cannot be changed or added after delivery.
