FormFactor CM300xi-ULN 300 mm semi-/ fully-automated probe system for Ultra Low Noise Measurements

Introducing the FormFactor CM300xi-ULN 300 mm semi-/ fully-automated probe system for Ultra Low Noise Measurements

CM300xi-ULN Overview

300 mm Probe Station for Flicker Noise (1/f), Random Telegraph Signal Noise (RTN or RTS), and Phase Noise Measurements of Ultrasensitive Devices

FormFactor has enhanced it’s industry-leading CM300xi Probe Station with revolutionary technologies to meet new testing capabilities at the 5, 3, and 2 nm technology nodes, targeted for 5G and beyond applications. The new CM300xi-ULN now enables unprecedented measurement performance and achieves four significant industry firsts in the arena of on-wafer, low frequency flicker, RTN, and phase noise testing:

PureLine 3 Technology
First automated probe station to achieve -190dB spectral noise*

Plug In and Go
Integrated TestCell Power Management provides fully managed and filtered AC power to the entire system, prober and instruments

Autonomous 24/7 Operation
Up to 4x faster flicker noise thermal testing on 30 μm pads

Reduce Setup Time and Costs
Exclusive low noise site survey, and system verification services

Key Features

PureLine 3 Technology

• Provides an effectively noise free environment around the device under test (DUT)
• First automated probe station to achieve -190dB spectral noise*
• Up to 32x lower noise (1kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications
• Eliminates over 97% of the environmental noise experienced in previous probe systems
• Extensive collection of FormFactor patents, electrical design knowledge, and measurement system IP

Plug In and Go

• World’s first probe station with integrated TestCell Power Management (a TestCell is a connected set of equipment, including test software, instruments, probe station, thermal system, and related measurement accessories such as cables and on-wafer probes)
• Eliminates all ground-loop induced TestCell noise
• Low field emissions
• Provides fully managed and filtered AC power to the entire system, prober and instruments

Autonomous 24/7 Operation

• Up to 4x faster flicker noise thermal testing on 30 μm pads
• ULN optimized motorized DC probe positioners enable fully Autonomous DC and low frequency flicker noise probing over multiple temperatures
• For complete hands-free 24/7 operation

Low Noise Site Survey

• Performed by a FormFactor factory trained engineer to determine the best location to install the ULN system
• Enables a good location to be selected that will limit unwanted environment noise from degrading the TestCell performance
• Significantly reduces setup costs and tool deployment time
• Includes precision measurements of four critical noise sources: floor vibrations ( µg over 0.1Hz to 1KHz range), magnetic field strength (AC milligauss), Power-Line Noise, and Power-Line THD (total harmonic distortion)

Key Benefits

FormFactor’s new CM300xi-ULN (Ultra Low Noise) is a revolutionary 300 mm wafer probing system designed for highly accurate flicker noise (1/f), random telegraph signal noise (RTN or RTS), and phase noise measurements of ultra-sensitive devices.

With the newly patented PureLine™ 3 technology, the ULN probing system enables up to 32x lower noise (1 kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications. By eliminating over 97% of the environmental noise experienced in previous probe systems, the CM300xi-ULN system establishes a new industry gold standard for ultra-low noise measurements.

When integrated with noise test equipment (flicker noise, RTN, phase noise), the CM300xi-ULN offers the industry’s highest test throughput, using Contact Intelligence™ with motorized probe positioners, enabling fully Autonomous DC and low frequency noise probing with multi-DUT layouts for complete hands-free 24/7 operation.

Finally, the CM300xi-ULN takes the complexity out of low noise TestCell optimization. Just plug it in and go. TestCell Power Management eliminates all ground-loop induced TestCell noise and provides fully managed and filtered AC power to the entire system, prober and instruments.

Additionally, FormFactor’s exclusive low-noise Site Survey and System Verifications significantly reduce setup costs and tool deployment time. This allows lab engineers to focus on getting good device data, that can be used to reduce the number of costly re-designs and accelerate time to market with lower development costs.

* Typical noise (dBVrms/√Hz, 1kHz to 1MHz), with prober and thermal system enabled.

Applications: Flicker Noise (1/f), Random Telegraph Noise (RTN), and Phase Noise Measurements of Ultrasensitive Devices

Specifications

• ContactView (East-West orientation)
  Automation features:
•  Option off-axis PTPA
• Automated Thermal Management (ATM)
• TopHat (for shielded configurations only)
• Probe card holder for use with 4.5” probe cards (with cover for shielded configurations)