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Introducing the FormFactor CM300xi-ULN 300 mm semi-/ fully-automated probe system for Ultra Low Noise Measurements
CM300xi-ULN Overview
300 mm Probe Station for Flicker Noise (1/f), Random Telegraph Signal Noise (RTN or RTS), and Phase Noise Measurements of Ultrasensitive Devices
FormFactor has enhanced it’s industry-leading CM300xi Probe Station with revolutionary technologies to meet new testing capabilities at the 5, 3, and 2 nm technology nodes, targeted for 5G and beyond applications. The new CM300xi-ULN now enables unprecedented measurement performance and achieves four significant industry firsts in the arena of on-wafer, low frequency flicker, RTN, and phase noise testing:
PureLine 3 Technology
First automated probe station to achieve -190dB spectral noise*
Plug In and Go
Integrated TestCell Power Management provides fully managed and filtered AC power to the entire system, prober and instruments
Autonomous 24/7 Operation
Up to 4x faster flicker noise thermal testing on 30 μm pads
Reduce Setup Time and Costs
Exclusive low noise site survey, and system verification services
Key Features
PureLine 3 Technology
Provides an effectively noise free environment around the device under test (DUT)
First automated probe station to achieve -190dB spectral noise*
Up to 32x lower noise (1kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications
Eliminates over 97% of the environmental noise experienced in previous probe systems
Extensive collection of FormFactor patents, electrical design knowledge, and measurement system IP
Plug In and Go
World’s first probe station with integrated TestCell Power Management (a TestCell is a connected set of equipment, including test software, instruments, probe station, thermal system, and related measurement accessories such as cables and on-wafer probes)
Eliminates all ground-loop induced TestCell noise
Low field emissions
Provides fully managed and filtered AC power to the entire system, prober and instruments
Autonomous 24/7 Operation
Up to 4x faster flicker noise thermal testing on 30 μm pads
ULN optimized motorized DC probe positioners enable fully Autonomous DC and low frequency flicker noise probing over multiple temperatures
For complete hands-free 24/7 operation
Low Noise Site Survey
Performed by a FormFactor factory trained engineer to determine the best location to install the ULN system
Enables a good location to be selected that will limit unwanted environment noise from degrading the TestCell performance
Significantly reduces setup costs and tool deployment time
Includes precision measurements of four critical noise sources: floor vibrations ( µg over 0.1Hz to 1KHz range), magnetic field strength (AC milligauss), Power-Line Noise, and Power-Line THD (total harmonic distortion)
Key Benefits
FormFactor’s new CM300xi-ULN (Ultra Low Noise) is a revolutionary 300 mm wafer probing system designed for highly accurate flicker noise (1/f), random telegraph signal noise (RTN or RTS), and phase noise measurements of ultra-sensitive devices.
With the newly patented PureLine™ 3 technology, the ULN probing system enables up to 32x lower noise (1 kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications. By eliminating over 97% of the environmental noise experienced in previous probe systems, the CM300xi-ULN system establishes a new industry gold standard for ultra-low noise measurements.
When integrated with noise test equipment (flicker noise, RTN, phase noise), the CM300xi-ULN offers the industry’s highest test throughput, using Contact Intelligence™ with motorized probe positioners, enabling fully Autonomous DC and low frequency noise probing with multi-DUT layouts for complete hands-free 24/7 operation.
Finally, the CM300xi-ULN takes the complexity out of low noise TestCell optimization. Just plug it in and go. TestCell Power Management eliminates all ground-loop induced TestCell noise and provides fully managed and filtered AC power to the entire system, prober and instruments.
Additionally, FormFactor’s exclusive low-noise Site Survey and System Verifications significantly reduce setup costs and tool deployment time. This allows lab engineers to focus on getting good device data, that can be used to reduce the number of costly re-designs and accelerate time to market with lower development costs.
* Typical noise (dBVrms/√Hz, 1kHz to 1MHz), with prober and thermal system enabled.
Applications: Flicker Noise (1/f), Random Telegraph Noise (RTN), and Phase Noise Measurements of Ultrasensitive Devices
Trust the Experts at ACA TMetrix Inc.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
Probe card holder for use with 4.5” probe cards (with cover for shielded configurations)
Material handling unit
The footprint-optimized MHU301 can be configured to provide fully automated testing. It offers automated loading of the probe system with 200 mm and 300 mm SEMI spec wafers from FOUP/FOSB cassettes. The MHU301 comes with one SEMI standard load port. Manual loading of wafer fragments (> 10 mm x 10 mm), as well as full wafers, are supported through manual loading of the prober, which bypasses the MHU.
Wafer ID Reading
The probe system has the optional ability to automatically identify wafers. Wafers are identified by a barcode [BC 412 (SEMI T1-95 Standard] and IBM 412, OCR text [SEMI M12, M13 and M1.15 Standard], IBM, Triple and OCR-A fonts or 2D code [Data Matrix (T7 and M1.15 Standard)] at the top or bottom side of the wafer.
The TESLA300 Advanced On-Wafer Power Semiconductor Probe System is an integrated high-power test solution that enables the collection of accurate high-voltage and high-current measurement data up to 3 kV (triaxial) / 10 kV (coaxial) and 200 A (standard) / 600 A (high current), with complete operator safety.
