FormFactor PLC50

Introducing the FormFactor PLC50

The PLC50 is the most cost-effective and simple, yet highly-precise probing solution for wafers and substrates up to 80 mm at cryogenic temperatures. Specially designed for laboratory requirements, it supports a wide range of applications, including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 7 K with liquid helium. Application flexibility is ensured for DC and RF measurements of the latest silicon, compound semiconductor and superconductor devices. RF tests are supported by a wide range of probes, calibration substrates and other accessories, as well as WinCal XE™ calibration software. The unique LRRM, LRM+, NIST-style TRL and hybrid calibration methods are available with the WinCal XE wafer-level calibration and measurement software.

The PLC50 is equipped with a stable vibration isolating frame. The high-vacuum chamber with a hinged topside lid and an optical window made of quartz glass contains flanges for vacuum-tight mechanical feedthrough drives. Thus the chuck and up to six vacuum-type positioners can be easily operated from outside via cardan shaft. The high-vacuum pumping system consists of a wide-range Turbo-Molecular Pump (TMP), a diaphragm forepump, and a full-range vacuum gauge. The independently-cooled cryogenic shield ensures ice- and condensation-free probing.

Key Features

Flexibility

• Different substrate carriers for wafers up to 100 mm or single dies
• Up to six positioners
• Use with liquid nitrogen or helium, depending on the target temperature
• Probing with an open chamber lid possible under atmospheric condition
• Specially designed for laboratory environments
• Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

Stability

• Independently cooled cold shield
• Probe positioners placed inside vacuum chamber
• Short and stable probe arms
• Solid station frame with built-in vibration-isolation
• Ice- and condensation-free probing down to 77 K (liquid nitrogen) or below 7 K (liquid helium)
• Precise probe positioning
• Excellent measurement accuracy and repeatability
• Superior vibration attenuation

Ease of Use

• Ergonomic and straightforward design
• Simple microscope operation
• Hinged topside lid
• Comfortable and easy operation
• Quick and ergonomic change of DUT
• Topside access to probes and samples

High measurement throughput

• Independent control of linear chuck stage and positioners
• Contact/separation stroke for probe platen
• Fast, manual step-and-repeat testing of the whole wafer
• Simultaneous contacting and separation of all probes

Key Benefits

Applications: IV/CV, RF/mmW, Opto, MEMS

Cryogenic Systems

The use of on-wafer superconducting materials, other novel materials and traditional semiconductors at cryogenic temperatures (below about 123K, or -150°C) has risen markedly in recent years. Inventive new sensors take advantage of unique material properties at very low temperatures to detect a wide variety of physical phenomena such as infrared radiation, magnetic fields, x-rays, and more, for application in many fields such as health care, defense, industrial automation, and astronomy.  Learn More about Cryogenic Systems

Specifications

See more from datasheet