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FormFactor Cascade PM8 200 mm manual open probe system

FormFactor Cascade PM8 200 mm manual open probe system

  • Superior Mechanics
    • Highly stable granite base
    • Excellent measurement accuracy and repeatability
  • High Flexibility
    • Re-configurable for DC, RF, mmW, FA, WLR and more
    • 40 mm platen height adjustability
    • Fast transition between wafer and package test
  • Ease of use
    •  Low-profile, straightforward design
    • Easy and ergonomic operation
  • Double-side option
    • Front or backside probing capability
    • Access to top side and bottom side of device under test (DUT)

 

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Introducing the FormFactor Cascade PM8 200 mm manual open probe system

Cascade PM8 manual probe system from FormFactor is designed to provide a highly stable, ergonomic and flexible probing platform for precise analytical probing applications up to 200 mm, such as device and wafer characterizations, failure analysis (FA), RF/mmW/sub-THz probing and MEMS. The innovative fine-glide chuck stage offers both wide-range coarse movement and micrometer-level fine movement, simplifying precision measurements. The granite plate can withstand any thermal or mechanical influences and ensures complete system stability. The solid structure of the PM8 is ideal for all RF applications up to sub-THz range, supported by WinCal XE™ calibration software, including LRRM, LRM+, NIST style TRL and hybrid calibration methods.

The unique movable microscope bridge option provides an easy and ergonomic coarse and fine adjustment of the observation system of up to 200 mm, making all FA and inspection tasks and wafer-level reliability (WLR) tests easy. PM8 can be upgraded with a variety of accessories, such as laser cutters and the remote-controlled manual positioners for FA applications and chucks with special designs for calibration substrates and burnishing pads for high-frequency applications. Probe cards can be easily used for testing, and packaged parts can be tested with minimum setup adjustment.

 

FormFactor Cascade PM8 200 mm manual open probe system



FormFactor Cascade PM8 200 mm manual open probe system

Key Features

Superior Mechanics

  • Highly stable granite base
  • Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
  • 1 µm repeatable separation stroke
  • Excellent measurement accuracy and repeatability
  • Fast navigation and high-precision probe positioning

High Flexibility

  • Re-configurable for DC, RF, mmW, FA, WLR and more
  • Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
  • 40 mm platen height adjustability
  • Upgrade path to meet your future needs
  • Fast transition between wafer and package test

Ease of use

  • Low-profile, straightforward design
  • Easy and ergonomic operation

Double-side option

  • Front or backside instrumentation, e.g.: Integrating Sphere, Fiber setup, Pressure Module
  • Front or backside probing capability
  • Access to top side and bottom side of device under test (DUT)
  • Highly accurate light measurement

 



Key Benefits

Flexibility • Ideal for FA, WLR, RF/mmW, sub-THz and MEMS applications
• Extensive accessories available, such as laser cutters and a wide range of equipment for RF test
• Compatible with probe cards and/or packaged parts
Stability • Fine-glide chuck stage on highly-stable granite base
• Ideal for sub-micron probing
• Active platen cooling for thermal stability
• Solid structure
• Superior vibration attenuation
Ease of use • Low-profile, straightforward design for easy and
• Simple and easy to use microscope
• Simple and easy to use microscop

 


FormFactor Cascade PM8 200 mm manual open probe system


Trust the Experts at ACA TMetrix Inc.

ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.

Specifications

Chuck Stage
Travel Coarse: 200 mm x 200 mm (8.0 inch x 8.0 inch)
Fine: 10 mm x 10 mm (0.4 inch x 0.4 inch)
Fine-travel resolution < 1.0 µm (0.04 mils) (~0.8 mm/rev)
Feedback system Visual position indicator for fine movement with micrometer screw
Z load stroke 8 mm
Z load stroke repeatability ≤ 2 µm
Theta travel ± 6°
Motor-drive system High-performance micro stepper motor
Theta resolution < 6.75 x 10-3 (< ± 5 µm at wafer edge)
Manual Microscope Stage (Fixed Bridge)
Travel range 50 mm x 50 mm (2.1 inch x 2.1 inch) / 100 mm x 100 mm (4.0 inch x 4.0 inch)
Resolution ≤ 5 µm (0.2 mils)
Scope lift Manual: Tilt-back or linear pneumatic
Manual Microscope Stage (Movable Bridge)
Travel range 200 mm x 200 mm (8.0 inch x 8.0 inch)
Resolution Coarse: 88 mm (3.46 inch)/ rev.
Fine: 250 µm (9.8 mils)/ rev
Scope lift Manual: Tilt-back
Manual Microscope Stage (Movable Bridge)
Travel range 200 mm x 200 mm (8.0 inch x 8.0 inch)
Resolution Coarse: 88 mm (3.46 inch)/ rev.
Fine: 250 µm (9.8 mils)/ rev.
Scope lift Manual: Tilt-back
Programmable Microscope Stage*
Travel range 50 mm x 50 mm (2.0 inch x 2.0 inch)
Resolution 0.25 µm (0.01 mils)
Scope lift Programmable, 130 mm

* Electronics box required for manual systems (P/N 157-137).

 

Datasheet


Contact ACA TMetrix Inc.

Address

3585 Laird Road, Unit 15 & 16, Mississauga ON L5L 5Z8

Phone: 1-800-665-7301

Fax: 1-905-890-1959

Email: info@tmetrix.com

About ACA TMetrix Inc.

ACA TMetrix Inc. is a leading supplier of test instruments and design tools in Canada. For over 50 years we have provided services and support for products that are manufactured by the world's leading instrument suppliers.

TMetrix Ltd. is Part of the ACA Group of Companies. Allan Crawford Associates (ACA), is one of Canada's largest distributors of electronic components, test equipment, and scientific solutions.

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