Description
ThermoChuck Systems for Precise Wafer Testing
The Temptronic ThermoChuck Systems are advanced conductive heating and cooling platforms engineered for wafer testing in probe stations. Built for accuracy and reliability, ThermoChucks provide a controlled thermal environment that supports applications such as wafer probing, laser trimming, and burn-in testing. With exceptional versatility, these systems can operate in extreme conditions ranging from -65°C to +300°C, ensuring precise thermal management across a wide range of semiconductor testing needs.
Flexible Wafer Testing with ThermoChuck
ThermoChuck platforms are available for 150mm, 200mm, and 300mm wafers, making them suitable for diverse semiconductor devices. Each system is designed to integrate seamlessly with probe stations, with retrofit options available for existing setups. The choice of surface plating — gold or nickel — allows customization based on testing requirements, while specialized configurations support advanced probing applications like low-noise leakage testing at the femtoampere level and high-voltage probing up to 10kV.
Robust Cooling and Heating Options
To ensure stable performance, ThermoChuck systems feature a range of cooling and heating technologies. Options include mechanical refrigeration, glycol/water closed-loop systems, air cooling with vortex, and resistive or thermoelectric heating methods. These configurations provide reliable performance and consistent thermal cycling without compromising accuracy or speed.
Why Choose ThermoChuck Systems
Temptronic’s ThermoChuck technology is trusted by semiconductor engineers worldwide for its reliability, precision, and adaptability. Whether for production wafer probing, device characterization, or research applications, ThermoChucks deliver consistent results with customizable configurations tailored to specific probe station models and voltage requirements.
Tabular Data: ThermoChuck System Specifications
| Model | Wafer Size | Temperature Range | Cooling Method | Heating Method | Voltage |
| TP03000A | 150mm/200mm | -65 to +200°C | Mechanical refrigeration, closed loop liquid cooling | ThermoElectric | 115V/220V |
| TP03010A | 150mm/200mm | +20 to +200°C | Open loop air or water cooling* | ThermoElectric | 115V/220V |
| TP03010B | 150mm/200mm | 0 to +200°C | Closed loop glycol/water cooling | ThermoElectric | 115V/220V |
| TP03015A | 150mm/200mm | +30 to +200°C (+300°C optional) | Open loop air or water cooling* | Resistive | 115V/220V |
| TP03015B | 150mm/200mm | +30 to +200°C (+300°C optional) | Closed loop glycol/water cooling | Resistive | 115V/220V |
| TP03500A | 300mm | -55 to +200°C | Mechanical refrigeration, closed loop liquid cooling | Resistive | 220V |
| TP03500D | 300mm | +20 to +200°C (+300°C optional) | Open loop air cooling with Vortex* | Resistive | 220V |
| TP03500E | 300mm | +30 to +200°C (+300°C optional) | Open loop air cooling | Resistive | 220V |
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