Cascade TESLA300 is a 300 mm semi- and fully-automated probe system for advanced on-wafer power device characterization, ensuring safe, precise, and high-power testing.
Key Features:
- On-wafer device testing up to 10,000 V DC / 600 A
- AttoGuard™ and FemtoGuard™ chuck technologies for low-leakage, high-accuracy measurements
- MicroVac™ chuck ensures thin wafer stability and minimal contact resistance
- TÜV-certified safety system with full enclosure and interlocks
- Wide thermal range: -60°C to +300°C with TopHat chamber
- Roll-out chuck and auxiliary mounts for flexible wafer handling
- Remote operation and full software integration with Velox and analyzers
- Material Handling Unit (MHU301) for automated wafer loading and barcode recognition