Description
Cascade CM300xi-ULN Ultra Low Noise Probe System
The Cascade CM300xi-ULN Probe System is FormFactor’s advanced 300 mm wafer probing platform, engineered to deliver breakthrough measurement performance for the most demanding applications. Built upon the proven CM300xi platform, the ULN edition introduces revolutionary technologies that redefine low noise wafer-level testing.
This semi- and fully-automated prober is designed specifically for flicker noise (1/f), random telegraph noise (RTN), and phase noise characterization of ultra-sensitive devices. By integrating PureLine™ 3 technology, the CM300xi-ULN achieves industry-first performance with up to 32x lower noise at 1 kHz and spectral noise levels down to -190 dB. It eliminates more than 97% of environmental interference, enabling precise data collection even at advanced nodes such as 7 nm, 5 nm, and 2 nm for 5G and beyond applications.
The system is equipped with a shielded MicroChamber™ environment, ensuring complete EMI/RFI isolation, as well as dark and moisture-free conditions for testing light-sensitive or cryogenic devices. The Plug-and-Go TestCell Power Management provides fully managed and filtered AC power, removing ground-loop noise and simplifying setup.
For productivity, the CM300xi-ULN supports autonomous 24/7 operation. Optimized motorized probe positioners, Contact Intelligence™, and Velox automation software allow for hands-free operation across multiple devices and temperatures. Optional modules such as SMU filtering, thermal filtering, and single-point grounding further enhance accuracy and repeatability.
Engineers benefit from exclusive site survey and system verification services, reducing deployment time and ensuring reliable performance. Combined with industry-leading DCP-HTR probes, capable of fA-level current and fF-level capacitance measurements, the CM300xi-ULN sets a new standard in wafer-level noise testing.
This system empowers semiconductor labs to accelerate time to market, cut costly redesigns, and ensure dependable results at the most advanced technology nodes.
Technical Highlights of CM300xi-ULN
Feature Category | Specification / Capability |
Wafer Size Support | 200 mm / 300 mm |
Measurement Focus | Flicker Noise (1/f), RTN, Phase Noise |
Noise Performance | Up to -190 dB spectral noise; 32x lower noise at 1 kHz |
Thermal Range | -65°C to +300°C |
Probing Environment | Fully shielded MicroChamber™, EMI/RFI isolated |
Operation Mode | Semi-automated or Fully-automated |
Probes Supported | DCP-HTR probes for fA current and fF capacitance |
Automation | Contact Intelligence™, Velox software, 24/7 autonomous |
Power Management | Integrated TestCell Power Management with filtered AC supply |
Wafer Handling | Up to 25 wafers (SEMI-standard cassettes) |
System Verification | Factory-measured spectral noise density and AC chuck noise |
Click here to learn more about similar products from FormFactor Beaverton Inc.