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CM300xi-ULN Probe System

CM300xi-ULN Probe System

Cascade CM300xi-ULN Probe System – Ultra Low Noise 300 mm Wafer Prober

Key Features:

  • Ultra-low noise measurements with patented PureLine™ 3 technology.
  • Ideal for flicker noise (1/f), RTN, and phase noise testing of ultra-sensitive devices.
  • Fully shielded MicroChamber™ for EMI/RFI protection and frost-free low-temperature operation.
  • Plug-and-Go TestCell Power Management eliminating ground-loop noise.
  • Autonomous 24/7 operation with optimized motorized probe positioners.
  • Wide thermal range from -65°C to +300°C with fA/fF measurement precision.
  • Integrated Velox software for simple, efficient automation.

 

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Description

Cascade CM300xi-ULN Ultra Low Noise Probe System

The Cascade CM300xi-ULN Probe System is FormFactor’s advanced 300 mm wafer probing platform, engineered to deliver breakthrough measurement performance for the most demanding applications. Built upon the proven CM300xi platform, the ULN edition introduces revolutionary technologies that redefine low noise wafer-level testing.

This semi- and fully-automated prober is designed specifically for flicker noise (1/f), random telegraph noise (RTN), and phase noise characterization of ultra-sensitive devices. By integrating PureLine™ 3 technology, the CM300xi-ULN achieves industry-first performance with up to 32x lower noise at 1 kHz and spectral noise levels down to -190 dB. It eliminates more than 97% of environmental interference, enabling precise data collection even at advanced nodes such as 7 nm, 5 nm, and 2 nm for 5G and beyond applications.

The system is equipped with a shielded MicroChamber™ environment, ensuring complete EMI/RFI isolation, as well as dark and moisture-free conditions for testing light-sensitive or cryogenic devices. The Plug-and-Go TestCell Power Management provides fully managed and filtered AC power, removing ground-loop noise and simplifying setup.

For productivity, the CM300xi-ULN supports autonomous 24/7 operation. Optimized motorized probe positioners, Contact Intelligence™, and Velox automation software allow for hands-free operation across multiple devices and temperatures. Optional modules such as SMU filtering, thermal filtering, and single-point grounding further enhance accuracy and repeatability.

Engineers benefit from exclusive site survey and system verification services, reducing deployment time and ensuring reliable performance. Combined with industry-leading DCP-HTR probes, capable of fA-level current and fF-level capacitance measurements, the CM300xi-ULN sets a new standard in wafer-level noise testing.

This system empowers semiconductor labs to accelerate time to market, cut costly redesigns, and ensure dependable results at the most advanced technology nodes.

Technical Highlights of CM300xi-ULN

Feature Category Specification / Capability
Wafer Size Support 200 mm / 300 mm
Measurement Focus Flicker Noise (1/f), RTN, Phase Noise
Noise Performance Up to -190 dB spectral noise; 32x lower noise at 1 kHz
Thermal Range -65°C to +300°C
Probing Environment Fully shielded MicroChamber™, EMI/RFI isolated
Operation Mode Semi-automated or Fully-automated
Probes Supported DCP-HTR probes for fA current and fF capacitance
Automation Contact Intelligence™, Velox software, 24/7 autonomous
Power Management Integrated TestCell Power Management with filtered AC supply
Wafer Handling Up to 25 wafers (SEMI-standard cassettes)
System Verification Factory-measured spectral noise density and AC chuck noise

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