Discount Products: Look through products available for a 25% – 50% discount in 2020. The items provided on a first come, first serve basis. View Discounted Products
Discount Products: Look through products available for a 25% – 50% discount in 2020. The items provided on a first come, first serve basis. View Discounted Products
Cascade PM300 probe system from FormFactor is the ideal solution for engineering tests of 300 mm wafers and substrates. Whatever your application, the versatility of the PM300 meets all requirements from failure analysis (FA) to device and wafer characterization (DWC) to wafer-level reliability (WLR) testing and always ensures the highest accuracy. With the optional square chuck, the PM300 can be also used for testing of flat panel displays.
The superior mechanics of the probe system are the basis for stable and precise system setup regardless of your application. The X and Y axes of the chuck stage can be moved easily and individually for fast coarse adjustment. Each axis has been designed with an individual magnetic lock and a vacuum brake that enables the fine glide chuck stage to be exactly positioned whenever you release the button. Fine adjustment is ensured for X and Y by high-precision micrometers.
The PM300 has been designed with the user in mind. You can start out with the basic setup of the PM300 and the system is scalable to meet your expanding test requirements. For example, light-sensitive measurements in a ShieldEnclosure™,thermal chucks or various high-frequency test setups up to mmW are available. Further flexibility is achievable with motorized probe positioners.
Flexibility | • Flexible design for engineering tests •Easy changeover between different applications •Ideal for failure analysis, DWC and WLR applications •Wide range of accessories available, for example ShieldEnclosure SE1200 •Thermal chucks (only hot) and motorized microscope available |
Stability | •Superior mechanics for highest degree of stability |
Ease of use | •Quick and easy system set up •Independent, coarse movement of X and Y axes •Easy fine adjustments through high-precision micrometers located on frontside of chuck stage •Independent magnetic locks and vacuum brakes for X and Y axes •Ergonomic low-profile design |
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
Chuck Stage | |
Range of movement | X, Y, theta |
Coarse adjustment | 300 mm x 300 mm |
Planarity of granite slab over entire range of movement | < ± 2.5 µm |
Load stroke | Standard mode: ≤ 2 µm (0.08 mils), Precision mode: ≤ 0.3 μm (0.012 mils) |
Speed | 10 mm |
Theta travel | ± 8° |
Chuck | |
Diameter | 300 mm (optional square) |
Planarity | 8 µm |
Probe Platen | |
Z travel | 40 mm |
Contact / Separation stroke | 0.4 mm |
Utilities | |
Power | 115 / 230 V, 50 / 60 Hz |
Vacuum | – 0.8 bar |
Compressed air | 6 to 10 bar |
* Data, design and specification depend on individual process conditions and can vary according to equipment configurations. Not all specifications may be valid simultaneously
Datasheet