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Introducing the FormFactor Cascade PM300 300 mm manual probe system
Cascade PM300 probe system from FormFactor is the ideal solution for engineering tests of 300 mm wafers and substrates. Whatever your application, the versatility of the PM300 meets all requirements from failure analysis (FA) to device and wafer characterization (DWC) to wafer-level reliability (WLR) testing and always ensures the highest accuracy. With the optional square chuck, the PM300 can be also used for testing of flat panel displays.
The superior mechanics of the probe system are the basis for stable and precise system setup regardless of your application. The X and Y axes of the chuck stage can be moved easily and individually for fast coarse adjustment. Each axis has been designed with an individual magnetic lock and a vacuum brake that enables the fine glide chuck stage to be exactly positioned whenever you release the button. Fine adjustment is ensured for X and Y by high-precision micrometers.
The PM300 has been designed with the user in mind. You can start out with the basic setup of the PM300 and the system is scalable to meet your expanding test requirements. For example, light-sensitive measurements in a ShieldEnclosure™,thermal chucks or various high-frequency test setups up to mmW are available. Further flexibility is achievable with motorized probe positioners.
Key Features
Superior Mechanics
Highly stable granite base
Independent, coarse movement of X and Y axes, combined with easy fine adjustments
Excellent measurement accuracy and repeatability
Fast navigation and high-precision probe positioning
High Flexibility
Re-configurable for DC, RF, mmW, FA, WLR and more
Full thermal range of -60°C to +300°C
Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
40 mm platen height adjustability
Upgrade path to meet your future needs
Fast transition between wafer and packaged device test
Ease of Use
Low-profile, straightforward design
Spacious top chambers for up to 12 positioners
Easy and ergonomic operation
Shielding
Reduces electrical noise by providing a fully electromagnetically shielded, ultra-low-noise, light-tight environment
Enables accurate low-noise measurements of atto amperes, femtofarads and microvolts at temperatures down to -60°C
Ideal conditions for sensitive applications such as 1/f noise measurements
Full thermal range of -60°C to +300°C available
Key Benefits
Flexibility
• Flexible design for engineering tests
•Easy changeover between different applications
•Ideal for failure analysis, DWC and WLR applications
•Wide range of accessories available, for example ShieldEnclosure SE1200
•Thermal chucks (only hot) and motorized microscope available
Stability
•Superior mechanics for highest degree of stability
Ease of use
•Quick and easy system set up
•Independent, coarse movement of X and Y axes
•Easy fine adjustments through high-precision micrometers located on frontside of chuck stage
•Independent magnetic locks and vacuum brakes for X and Y axes
•Ergonomic low-profile design
Trust the Experts at ACA TMetrix Inc.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
Specifications
Chuck Stage
Range of movement
X, Y, theta
Coarse adjustment
300 mm x 300 mm
Planarity of granite slab over entire range of movement
* Data, design and specification depend on individual process conditions and can vary according to equipment configurations. Not all specifications may be valid simultaneously
The TESLA300 Advanced On-Wafer Power Semiconductor Probe System is an integrated high-power test solution that enables the collection of accurate high-voltage and high-current measurement data up to 3 kV (triaxial) / 10 kV (coaxial) and 200 A (standard) / 600 A (high current), with complete operator safety.
