Products

Cascade SUMMIT200 Advanced 200 mm Probe Station

Key Features:

• High-accuracy electrical measurements for DC, RF, mmW, and THz applications.
• Up to 5X faster time to accurate data with automated wafer handling.
• Wide thermal range from -60°C to +300°C with IceShield™.
• PureLine™, AttoGuard®, and MicroChamber® technologies for ultra-low noise performance.
• Precision sub-micron positioning with advanced 4-axis stage and VueTrack PRO.
• Flexible platform for device characterization, FA, WLR, and design debug.
• Velox control software with modern UI, workflow guide, and automation tools.
• Ergonomic operation with quick manual wafer access and roll-out stage.

Cascade TESLA300 is a 300 mm semi- and fully-automated probe system for advanced on-wafer power device characterization, ensuring safe, precise, and high-power testing.

Key Features:

• On-wafer device testing up to 10,000 V DC / 600 A
• AttoGuard™ and FemtoGuard™ chuck technologies for low-leakage, high-accuracy measurements
• MicroVac™ chuck ensures thin wafer stability and minimal contact resistance
• TÜV-certified safety system with full enclosure and interlocks
• Wide thermal range: -60°C to +300°C with TopHat chamber
• Roll-out chuck and auxiliary mounts for flexible wafer handling
• Remote operation and full software integration with Velox and analyzers
• Material Handling Unit (MHU301) for automated wafer loading and barcode recognition

Cascade CM300xi-SiPh Probe System – 300 mm Wafer and Die-Level Photonics Testing

Key Features:

• Integrated silicon photonics wafer and die-level probing solution.
• Autonomous SiPh Measurement Assistant for hands-free calibration.
• OptoVue™ technology for real-time, in-situ optical calibrations.
• Supports vertical, horizontal edge, and wafer-level edge coupling.
• Dark, shielded, frost-free environment with SiPh TopHat.
• Thermal capability from -40°C to +125°C.
• Exclusive SiPh-Tools and Photonics Controller Interface (PCI) software.
• Partnerships with Keysight and PI for precision instrumentation.
• Easy setup and automation with Velox and Velox Dash™ interface.

Cascade CM300xi-ULN Probe System – Ultra Low Noise 300 mm Wafer Prober

Key Features:

• Ultra-low noise measurements with patented PureLine™ 3 technology.
• Ideal for flicker noise (1/f), RTN, and phase noise testing of ultra-sensitive devices.
• Fully shielded MicroChamber™ for EMI/RFI protection and frost-free low-temperature operation.
• Plug-and-Go TestCell Power Management eliminating ground-loop noise.
• Autonomous 24/7 operation with optimized motorized probe positioners.
• Wide thermal range from -65°C to +300°C with fA/fF measurement precision.
• Integrated Velox software for simple, efficient automation.

A compact and flexible semi-automated wafer probe system designed for RF/DC modeling, device characterization, and advanced measurement needs.

Key Features:

• Mechanical platen lift for safer RF set-ups and reduced operator errors
• Fully compatible with Autonomous RF/DC measurement assistants and Velox Dash™ app
• Reconfigurable platen inserts (TopHat, PCH, IceShield) for versatile test configurations
• Spacious platen design supporting RF and DC setups with ease
• Compact footprint with field-upgradable components
• Integrated Low-Volume MicroChamber and FemtoGuard thermal triaxial chuck

Key Features

• Supports wafers up to 200 mm (optional 300 mm upgrade)
• Operates at cryogenic temperatures down to 10 K
• Semi-automated with optional full automation via autoloader
• Compatible with liquid nitrogen, liquid helium, or cryo-cooler
• Ice- and condensation-free probing for stable performance
• Up to eight probe positioners or probe card integration
• Solid vibration-isolated frame for precision measurements
• Velox software with intuitive alignment and automation

Key Features

• Entry-level manual wafer probing in vacuum < 1×10⁻⁴ mbar
• Supports wafers up to 150 mm or single dies
• Up to six probe positioners for flexible testing
• Optional thermal chuck from -60°C to +300°C
• Probing possible with open chamber lid at atmosphere
• Stable, vibration-isolated frame for precise results
• Ergonomic design with hinged topside lid for easy access
• Independent control of chuck stage and positioners
• Fast, manual step-and-repeat wafer testing

Cascade PM300 – 300 mm Analytical Probe Station

Key Features:

• Industry benchmark for manual wafer probing and failure analysis.
• Superior mechanical stability with granite base for precision and repeatability.
• High-precision probe positioning with independent X-Y coarse and fine adjustments.
• Configurable for DC, RF, mmW, WLR, FA, and 3D IC testing.
• Wide thermal range: -60°C to +200°C (PM300PS) / +15°C to +300°C (PM300).
• Optional electromagnetic shielding (PM300PS) for ultra-low-noise environments.
• Spacious, ergonomic design supporting up to 12 positioners.
• Upgradeable platform to support future testing needs.

Cascade TESLA300 – Advanced On-Wafer Power Device Characterization

Key Features:

• High-voltage and high-current testing up to 10 kV / 600 A.
• Integrated AttoGuard™ and FemtoGuard™ technology for ultra-low leakage and capacitance.
• MicroVac™ chuck surface for thin wafer handling and low contact resistance.
• TÜV-certified safety system with interlocks and full enclosure.
• Top-lift wafer loading eliminates lift pins for accurate vertical device measurements.
• Full thermal range from -60°C to +300°C with efficient transition times.
• Seamless integration with Keysight and Keithley analyzers.
• Remote operation capability for safe offsite control.
• Velox and Velox Dash™ software for intuitive automation.

• Highly Damped Step Respond
• Simple installation – No tuning require
• Application-specific designs/products/
• Capabilities to meet your needs
• Ability to support massive machines, tools, systems

• 6 degrees of freedom
• Active gain starting from 0.5Hz
• Variable Damping (patent pending)
• Build In Artificial Intelligence Feature
• Adjustable by software active bandwidth
• Remote control
• Built in real time diagnostic tools
  • Spectrum analyzer
  • Oscilloscope
• Shaker Mode

• 6 degrees of freedom
• Active gain starting from 0.5Hz
• Variable Damping (patent pending)
• Build In Artificial Intelligence Feature
• Adjustable by software active bandwidth
• Remote control
• Built in real time diagnostic tools
  • Spectrum analyzer
  • Oscilloscope
• Shaker Mode

• Highly Damped Step Respond
• Simple installation – No tuning require
• Application-specific designs/products/
• Capabilities to meet your needs
• Ability to support massive machines, tools, systems

• Proven member of a modular Power Module family, more than 800 units are in service
• Precision-regulated Bi-Polar output provides up to +12 to -12 Amps for Magnet loads.
• Smooth operation through zero amps output current, no “Crossover” problems.
• All 2510 MCOR12 Power Modules are identical and interchangeable.
• Has two high-precision measurements of output current;
  • one is used to close the regulation control loop,
  • provides an independent monitoring signal to the Crate Interface Card.
• Fault sensing circuitry in the module sets a Fault Latch which inhibits the output.
• A (momentary) Sync input signal inhibits MOSFET switching when it is active (high);
  • this eliminate switching noise .
  • reduces power line noise during sensitive analog signal measurements.

• Proven member of a modular Power Module family, more than 800 units are in service
• Precision-regulated Bi-Polar output provides up to +30 to -30 Amps for Magnet loads.
• Smooth operation through zero amps output current, no “Crossover” problems.
• All 2510R30 MCOR30 Power Modules are identical and interchangeable
  • Programming Card is plugged into the replacement module.
• Each channel has a critically-damped, LC noise filter with a cut-off frequency of about 8 kHz.
• A 16-pin front panel diagnostics connector taps onto major circuit nodes which enables quick “inthe-crate” fault evaluation

• 2U Chassis – 19″ rack mount 3.48” Height, 9.60” Depth and Weight 6lb.
• Power 120V AC 60Hz
• Washable front removable air filter
• Ball Bearing AC fans provide 330 CFM
• Dual plenum design
• Cooling for 160mm,220mm depth modules
• Diverts lower warmed air to rear of Cabinet
• RM option diverts lower air to front of Cabinet