300mm Probe Systems

The TESLA300 Advanced On-Wafer Power Semiconductor Probe System is an integrated high-power test solution that enables the collection of accurate high-voltage and high-current measurement data up to 3 kV (triaxial) / 10 kV (coaxial) and 200 A (standard) / 600 A (high current), with complete operator safety.

PureLine 3 Technology

First automated probe station to achieve -190dB spectral noise*

Plug In and Go

Integrated TestCell Power Management provides fully managed and filtered AC power to the entire system, prober and instruments

Autonomous 24/7 Operation

Up to 4x faster flicker noise thermal testing on 30 μm pads

Reduce Setup Time and Costs
Exclusive low noise site survey, and system verification services

• Superior Mechanics
  • Highly stable granite base
  • Fast navigation and high-precision probe positioning
• High Flexibility
  • Re-configurable for DC, RF, mmW, FA, WLR and more
  • Full thermal range of -60°C to +300°C
• Ease of Use
  • Low-profile, straightforward design
  • Spacious top chambers for up to 12 positioners
  • Easy and ergonomic operation
• Shielding
  • Reduces electrical noise by providing a fully electromagnetically shielded, ultra-low-noise, light-tight environment
  • Full thermal range of -60°C to +300°C available

200 mm semi-/ fully-automated production probe system

• Up to 20 dies/sec (70,000 dies/hour) with MultiDie Testing technology
• Faster time to data
• Highest Z-axis resolution of any production prober
• Highest Z-axis resolution of any production prober
• Interfaces to all major analysis instrumentation, optics software and testers
• Backside instrumentation, e.g.: Integrating Sphere, Fiber setup, Pressure Module
• Highly accurate light measurement

with Autonomous Silicon Photonics Measurement Assistant

• Revolutionary technology advancement for wafer and die-level photonics probing
• Enables autonomous measurements
• Highest accuracy in test results
• Reduced risk of damaging fibers with collision avoidance technology
• Easy setup even for less experienced users
• Minimized coupling losses with minimal trench dimensions
• Positioning hardware is precisely calibrated to the probe station and ready to perform die-to-die optical optimizations in minutes
• Other integrated features: Incident Angle Cal, Optical Rotation Scan, Optical Scan Data Analysis, Optical Tracking, Align Optical Probes
• 40°C to +125°C
• Enables hands-free autonomous calibration and re-calibration at multiple temperatures