Discount Products: Look through products available for a 25% – 50% discount in 2020. The items provided on a first come, first serve basis. View Discounted Products
Introducing the FormFactor Cascade PAV200 200 mm semi-automated vacuum probe system
The Cascade PAV200 probe system from FormFactor is the ideal solution for automatic testing of wafers and substrates up to 200 mm in a high vacuum environment up to 10-5 mbar. It supports a wide temperature range from -60°C to 300°C.
It supports a wide range of applications, including DC and RF measurements, MEMS and opto-engineering tests. The probe platen is designed to mount probe cards or up to eight vacuum-type positioners on magnetic feet. A high-resolution video microscope with 50 mm x 50 mm travel range is mounted either on a microscope mount with swivel or on a microscope bridge for vibrationsensitive test applications and additional test instruments.
Key Features
Flexibility
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Optional thermal chuck (-60°C to 300°C) and pressure regulation
Accessories available, such as black bodies and optical motion analysis tools
Optional upgrade for 300 mm wafer
Designed for industrial environments
Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
Ideal for small structures
Stability
Probe positioners placed inside vacuum chamber
Short and stable probe arms
Solid station frame with built-in vibration-isolation
Optional microscope bridge
Precise probe positioning
Excellent measurement accuracy and repeatability
Superior vibration attenuation
Stable image quality for demanding MEMS analysis
Ease of use
Joystick controller
Manual probe positioners with rotary feed-throughs
Front loading capability through load door
Comfortable and easy operation
Quick and ergonomic change of DUT
High measurement throughput
Software control of chuck for fast step-and-repeat testing of the entire wafer
Fast step-and-repeat testing of the whole wafer
Key Benefits
Flexibility
• Different substrate carriers for wafers up to 200 mm or single dies
• Upstream pressure, downstream pressure or medium vacuum regulation
•Velox™ probe station control software
•Wide range of measurements (I-V, C-V, two-port, multi-port and differential RF)
•RF tests supported by a wide range of probes and calibration tools, such as calibration
substrates and WinCal XE™ calibration software
•Accessories available, such as Black Bodies and optical motion analysis tools
Stability
•High accuracy, ideal for small structures
•Highly stable mechanics with a stable vibration isolation table
Ease of use
•Simple, straightforward design for easy and ergonomic operation
•Quick and ergonomic change of the DUT through front door
Automation
•Pressure control: up-stream, down-stream, high-precision capacitance vacuum gauges
•Bridge with rails for programmable movement of mounted instruments
High measurement
•Automatic control of chuck for fast step-and-repeat testing of the entire wafer throughput
Trust the Experts at ACA TMetrix Inc.
ACA TMetrix Inc. is a leading Canadian distributor of test and measurement instruments and design tools. For over 55 years we have provided products manufactured by the world’s leading instrument manufacturers. Leading Distributor of Design Tools and Test Equipment in Canada.
Specifications
The PAV200 is equipped with a stable vibration isolating frame. The chuck and the motorized chuck stage with 200 mm x 200 mm X-Y travel, theta and Z-axis are located inside the high-vacuum chamber. Up to eight vacuum-type positioners can be easily operated from outside of the chamber via vacuum-tight mechanical feedthrough drives and cardan shafts. For the use under vacuum conditions, specially-designed thermal chucks with electrical and cooling line bulk-feedthroughs are available.
