Products

• FormFactor probe system: T300, TESLA200, T200, EPS150TESLA (others available)
• Manual, semi-automatic and fully automatic probes station options
• FormFactor analytical probes: High Voltage Probes, High Current Probes, High-Power Probes
• I.P.S. “LuPo” High Voltage / High Power Probe Card (optional)
• Full over temperature measurements and automation from -60°C to +300°C
• Keysight power device analyzer (PDA): B1505A (others available)
• Keysight automation and modeling software: EasyEXPERT group+
• To complete the system: cables, adapters, mounting hardware, etc.

• Cryogenic Temperaturesy
  • Fully isolated experiment space for true 4K temperatures during probing
  • Cryogenic positioners to provide large travel ranges without warming up the device
  • Integrated helium pot for high temperature stability of the device under test
  • Fully dry cryogen-free cooler eliminates the need for expensive helium circulation systems
  • Rapid cool liquid nitrogen option for faster cool down times
• Low Vibration
  • Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
  • A soft vacuum bellows provides a compliant mounting interface for the cryocooler
  • Rigid support tube to direct vibrations from the cryocooler away from the sample
• Configurability
  • Quick release vacuum feedthroughs for easy configurability
  • A large rectangular port for high signal capacity
  • Multiple stage feedthroughs for thermally intercepting the signals
  • Large experimental space provides more workroom and configurable ports
  • Many available system options and add ons to choose from

For ACP, Infinity, and FPC Probes

150 mm modular probe station

• Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WL
• Re-configurable and upgradable as requirements grow
• Minimizes setup times with no loss in performance or accuracy
• Seamless integration of various measurement instruments

• Lithographic thin-film construction
• Excellent crosstalk characteristics
• Non-oxidizing nickel alloy tips
• Innovative force delivery mechanism
• 40GHz, 50GHz, 67GHz, 110GHz and 145GHz connectors available
• GSG, SG, GS, GSGSG, GSSG, SGS configurations
• 50 to 250 µm pitches (other pitches available on request)
• High current version (2 A) available

A configurable fine-pitch multi-contact RF/mmW probe for mixed-signal probing up to 110 GHz

• Customizable configuration up to 25 contacts: RF, Eye-Pass power, ground, logic
• Lithographically-defined tips allow automated over temperature measurement on pads as small as 30 µm x 50 µm
• Low and repeatable contact resistance on aluminum pads (< 0.05 Ω) ensures accurate results
• Durable probe structure ensures more than 250,000 contacts
• Able to measure from -40°C to +125°C without compromising performance or accuracy of specifications

Repeatable measurements up to 500 GHz with improved crosstalk performance

• Probe loss is 3 dB typical between 140 and 200 GHz, S11/S22 15 dB typical
• Reduced unwanted couplings and transmission modes
• Able to shrink pad geometries to 25 x 35 µm (best case)
• Typical contact resistance < 0.05 Ω on Al, < 0.02 Ω on Au
• WR15, WR12, WR10, WR8, WR6, WR4, WR3, and WR2 bands available.

Next-generation, high-frequency performance with advanced features

• Continues the Infinity family’s Industry leading electrical performance
• High temperature capability (175° C +) for automotive device characterization and other applications
• Better tip visibility for enhanced placement accuracy and repeatability
• Improved tip life/durability with solid rhodium contacts
• New tip architecture enables support for narrower pitches (e.g. 25um)
• Advanced mechanical design combined with small contacts enables probing on smaller pads/pitches and improves durability and robustness

Test Up to 16 RF Signals with One Probe

• Ideal for multiport RF/Microwave and high-speed digital signal testing
• Mix DC and RF/Microwave signals on one probe
• Long lifetime – typically over one million (1,000,000) touchdowns
• Excellent performance in temperatures ranging from 10 K to 200°C
• Probe on any pad material with no damage

Cost-effective, versatile probe card solution

• Accommodates a combination of up to four Cascade Microtech probes
• Configurable for mixed-signal RF/mmW testing
• Quick and easy repairs to be performed in the field, by simply replacing individual probes
• Adaptable to new device layouts by exchanging individual probes

Multicontact Probe for RFIC Engineering Test

• Up to 12 contacts; any contact can be DC, Power, Logic to 500 MHz,or RF to 20 GHz
• Online design configuration tool helps you to specify your probe in minutes
• All designs are fully quadrant compatible
• Full solution includes probes, calibration substrates, stations, accessories and software
• Scalable architecture for future needs

HF and DC Signals on One Cost-Effective ProbeWedge

• Flexibility
  • The ProbeWedge family is compatible with your existing Cascade Microtech’s probing systems
  • Plug and play design provides easy handling and strain relief
  • Ideal probe solution for wafer-level reliability, multi-site tests and DC biasing
• Cost effectiveness
  • Alternative to inflexible probe cards, ideal for changing demands in R&D
  • All cables can be re-used and additional single cables can be ordered
  • Probe blades can be repaired individually
• Accuracy
  • Kelvin ProbeWedge is ideal for low-resistance measurements
  • Fully-guarded microstrip blades for low-current measurements down to fA range

A configurable fine-pitch multi-contact RF/mmW probe for mixed-signal probing up to 110 GHz

• Customizable configuration up to 25 contacts: RF, Eye-Pass power, ground, logic
• Lithographically-defined tips allow automated over temperature measurement on pads as small as 30 µm x 50 µm
• Low and repeatable contact resistance on aluminum pads (< 0.05 Ω) ensures accurate results
• Durable probe structure ensures more than 250,000 contacts
• Able to measure from -40°C to +125°C without compromising performance or accuracy of specifications

100 mm manual cryogenic probe system

• Specially designed for laboratory environments
• Different substrate carriers for wafers up to 100 mm or single dies
• Probe positioners placed inside vacuum chamber
• Excellent measurement accuracy and repeatability
• Simple microscope operation
• Comfortable and easy operation
• Fast, manual step-and-repeat testing of the whole wafer
• Simultaneous contacting and separation of all probes

Multi-Configurable Optical Probe for Photonic Device Characterization

• Flexibility and ease of use
  • Field-replaceable fibers optimized for a variety of applications
  • Wafer mapping capability and visual display of key parameters
• Accuracy
  • Patented contact protection design ensures fast, accurate, and repeatable measurements at the wafer and substrate level
  • Minimized electrical parasitics for at-speed testing
• Compatibility
  • Standard FC type fiber-optic connector
  • Compatible with FormFactor probe stations and accessories