Cryogenic Systems

• Flexibility
  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Use with liquid nitrogen or helium, depending on the target temperature
• Stability
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
• Ease of Use
  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Front loading capability through load door
  • Comfortable and easy operation

• Flexibility
  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Optional thermal chuck (-60°C to 300°C) and pressure regulation
• Stability
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
• Ease of Use
  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Front loading capability through load door
• High measurement throughput
  • Software control of chuck for fast step-and-repeat testing of the entire wafer
  • Fast step-and-repeat testing of the whole wafer

• Flexibility
  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Optional thermal chuck (-60°C to 300°C) and pressure regulation
• Stability
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
• Ease of Use
  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Front loading capability through load door
  • Comfortable and easy operation
• High measurement throughput
  • Software control of chuck for fast step-and-repeat testing of the entire wafer
  • Fast step-and-repeat testing of the whole wafer

• Superior Mechanics
  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Use with liquid nitrogen or helium, depending on the target temperature
• Stability
  • Independently cooled cold shield
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Optional upgrade for 300 mm wafer
• Ease of Use
  • Intuitive, manual drives
  • Front loading capability through load door
  • Comfortable and easy operation
• High measurement throughput
  • Independent control of linear chuck stage and positioners
  • Contact/separation stroke for chuck
  • Fast, manual step-and-repeat testing of the whole wafer

• Rapid image acquisition
• High resolution imaging
• SQUID sensor autotuning
• Unattended operation
• Sample size
• Closed-loop scanner stage
• Magnetic shielding
• Magnetic field control
• Flexible sensor integration
• Cryogen-free

• Cryogenic Temperaturesy
  • Fully isolated experiment space for true 4K temperatures during probing
  • Cryogenic positioners to provide large travel ranges without warming up the device
• Low Vibration
  • Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
  • A soft vacuum bellows provides a compliant mounting interface for the cryocooler
• Configurability
  • Quick release vacuum feedthroughs for easy configurability
  • A large rectangular port for high signal capacity
  • Multiple stage feedthroughs for thermally intercepting the signals
  • Many available system options and add ons to choose from

• Low vibration from < 1 Hz to 1 kHz
  • Opposed bellows
  • Passive isolation
  • Active isolation (optional)
• 4 K platform with quick access
• 4 K electrical and fiber optic feedthroughs
• Expandable, modular construction
• Easy, flexible I/O
  • 8x NW50 flanges below the table
  • 8x HPD standard cable feethrough flanges on 50 K and 3 K plates
  • Cable feedthroughs on base flange above the table
  • Standard ports for DC, RF & optical fibers 8x HPD standard cable
• Smart controls
  • Pushbutton auto cooldown from atmosphere TCP/IP control
  • Cryogen-free

• Cryogenic Temperaturesy
  • Fully isolated experiment space for true 4K temperatures during probing
  • Cryogenic positioners to provide large travel ranges without warming up the device
  • Integrated helium pot for high temperature stability of the device under test
  • Fully dry cryogen-free cooler eliminates the need for expensive helium circulation systems
  • Rapid cool liquid nitrogen option for faster cool down times
• Low Vibration
  • Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
  • A soft vacuum bellows provides a compliant mounting interface for the cryocooler
  • Rigid support tube to direct vibrations from the cryocooler away from the sample
• Configurability
  • Quick release vacuum feedthroughs for easy configurability
  • A large rectangular port for high signal capacity
  • Multiple stage feedthroughs for thermally intercepting the signals
  • Large experimental space provides more workroom and configurable ports
  • Many available system options and add ons to choose from

100 mm manual cryogenic probe system

• Specially designed for laboratory environments
• Different substrate carriers for wafers up to 100 mm or single dies
• Probe positioners placed inside vacuum chamber
• Excellent measurement accuracy and repeatability
• Simple microscope operation
• Comfortable and easy operation
• Fast, manual step-and-repeat testing of the whole wafer
• Simultaneous contacting and separation of all probes